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@article{1591484,
author = {Fekete, Matej and Bernátová, Katarína and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
article_location = {Bristol},
article_number = {2},
doi = {http://dx.doi.org/10.1088/1361-6595/ab5f2b},
keywords = {magnetron sputtering; reactive HiPIMS; ionisation fraction; titanium; oxygen},
language = {eng},
issn = {0963-0252},
journal = {Plasma Sources Science and Technology},
title = {Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture},
url = {https://iopscience.iop.org/article/10.1088/1361-6595/ab5f2b/pdf},
volume = {29},
year = {2020}
}
TY - JOUR
ID - 1591484
AU - Fekete, Matej - Bernátová, Katarína - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY - 2020
TI - Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture
JF - Plasma Sources Science and Technology
VL - 29
IS - 2
SP - 1-9
EP - 1-9
PB - IOP Publishing Ltd.
SN - 09630252
KW - magnetron sputtering
KW - reactive HiPIMS
KW - ionisation fraction
KW - titanium
KW - oxygen
UR - https://iopscience.iop.org/article/10.1088/1361-6595/ab5f2b/pdf
L2 - https://iopscience.iop.org/article/10.1088/1361-6595/ab5f2b/pdf
N2 - In this paper, the hysteresis behaviour of reactive magnetron sputtering process with oxygen admixture is studied by both experiment and model. The ground state number densities of titanium atoms and ions, and the deposition rates in high power impulse magnetron sputtering discharge were determined for a constant average applied power and pulse duration, while the repetition frequency and reactive gas supply were varied. The hysteresis curve reduced in width and shifted towards the lower oxygen supply with a decrease in the repetition frequency. These experimentally observed trends were well reproduced by a modified Berg model. The presented model utilised measured ionisation fraction of sputtered species and considered the back-attraction of the ionised sputtered species to the target. Significance of back–attraction process was observed as large fraction of ionised sputtered particles was found to be lost back to the target. This drastically decreased the number of particles deposited onto the substrate, which reduced not only the deposition rate, but also the gettering of the reactive gas. Consequently, the simulated hysteresis curve was shifted and reduced in width as it was observed experimentally.
ER -
FEKETE, Matej, Katarína BERNÁTOVÁ, Peter KLEIN, Jaroslav HNILICA a Petr VAŠINA. Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture. \textit{Plasma Sources Science and Technology}. Bristol: IOP Publishing Ltd., 2020, roč.~29, č.~2, s.~1-9. ISSN~0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/ab5f2b.
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