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@proceedings{1591498,
author = {Bernátová, Katarína and Fekete, Matej and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
booktitle = {International Conference on Reactive Sputter Deposition},
keywords = {reactive HiPIMS; density; titanium; ionized density fraction},
language = {eng},
title = {Temporal evolution of sputtered species number densities in reactive HiPIMS with nitrogen admixture},
url = {https://www.ist.fraunhofer.de/en/trade_fairs_events/2019/rsd-2019.html},
year = {2019}
}
TY - CONF
ID - 1591498
AU - Bernátová, Katarína - Fekete, Matej - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY - 2019
TI - Temporal evolution of sputtered species number densities in reactive HiPIMS with nitrogen admixture
KW - reactive HiPIMS
KW - density
KW - titanium
KW - ionized density fraction
UR - https://www.ist.fraunhofer.de/en/trade_fairs_events/2019/rsd-2019.html
N2 - In this work, the nitrogen gas admixture effect on the temporal evolution of discharge current, voltage, pressure and ionization fraction of sputtered species in HiPIMS process is analyzed. The temporal evolution of an absolute number of sputtered titanium atom and ion density is estimated during the HiPIMS pulse using the spectroscopic method based on effective branching fractions. Furthermore, from the sputtered titanium atom and ion densities, the ionized titanium density fraction is estimated in the magnetized plasma region close to the cathode. The temporal ionized titanium density fraction evolution is similar to titanium ion density evolution across the all hysteresis curve. The ionization fraction of the sputtered species is around 90 % independently on the nitrogen gas flow.
ER -
BERNÁTOVÁ, Katarína, Matej FEKETE, Peter KLEIN, Jaroslav HNILICA a Petr VAŠINA. Temporal evolution of sputtered species number densities in reactive HiPIMS with nitrogen admixture. In \textit{International Conference on Reactive Sputter Deposition}. 2019.
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