Approximations of reflection and transmission coefficients of
inhomogeneous thin films based on multiple-beam interference
model

J 2019

Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model

OHLÍDAL, Ivan; Jiří VOHÁNKA; Jan MISTRÍK; Martin ČERMÁK; František VIŽĎA et al.

Základní údaje

Originální název

Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model

Autoři

OHLÍDAL, Ivan; Jiří VOHÁNKA; Jan MISTRÍK; Martin ČERMÁK; František VIŽĎA a Daniel FRANTA

Vydání

Thin Solid Films, Elsevier, 2019, 0040-6090

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

odkaz na stránku nakladatele

Impakt faktor

Impact factor: 2.030

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/19:00112003

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Reflectance;Transmittance;Ellipsometric parameters;Inhomogeneous thin films

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 28. 3. 2020 14:05, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

A multiple-beam interference model is used to derive approximate formulae for the reflection and transmission coefficients of inhomogeneous thin films exhibiting large gradients of refractive index profiles. It is shown that these formulae are constituted by series containing the Wentzel-Kramers-Brillouin-Jeffreys term and correction terms with increasing order corresponding to number of considered internal reflections inside the films. A numerical analysis enabling us to show the influence of a degree of inhomogeneity on spectral dependencies of reflectance and ellipsometric parameters of inhomogeneous films is performed. Advantages and disadvantages of our approach compared with other approximate approaches are discussed. The optical characterization of a selected non-stoichiometric silicon nitride film prepared by reactive magnetron sputtering onto silicon single crystal substrate is performed for illustration of using our formulae in practice.

Návaznosti

LO1411, projekt VaV

Název: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy (Akronym: CEPLANT plus)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy

Citovat

OHLÍDAL, Ivan; Jiří VOHÁNKA; Jan MISTRÍK; Martin ČERMÁK; František VIŽĎA a Daniel FRANTA. Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model. Thin Solid Films. Elsevier, 2019, roč. 692, 31 December 2019, s. 1-17. ISSN 0040-6090. Dostupné z: https://doi.org/10.1016/j.tsf.2019.03.001.

@article{1598679,
   author = {Ohlídal, Ivan and Vohánka, Jiří and Mistrík, Jan and Čermák, Martin and Vižďa, František and Franta, Daniel},
   article_number = {31 December 2019},
   doi = {https://doi.org/10.1016/j.tsf.2019.03.001},
   keywords = {Reflectance;Transmittance;Ellipsometric parameters;Inhomogeneous thin films},
   language = {eng},
   issn = {0040-6090},
   journal = {Thin Solid Films},
   title = {Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model},
   url = {https://www.sciencedirect.com/science/article/pii/S0040609019301385},
   volume = {692},
   year = {2019}
}

TY  - JOUR
ID  - 1598679
AU  - Ohlídal, Ivan - Vohánka, Jiří - Mistrík, Jan - Čermák, Martin - Vižďa, František - Franta, Daniel
PY  - 2019
TI  - Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model
JF  - Thin Solid Films
VL  - 692
IS  - 31 December 2019
SP  - 1-17
EP  - 1-17
PB  - Elsevier
SN  - 00406090
KW  - Reflectance;Transmittance;Ellipsometric parameters;Inhomogeneous thin films
UR  - https://www.sciencedirect.com/science/article/pii/S0040609019301385
L2  - https://www.sciencedirect.com/science/article/pii/S0040609019301385
N2  - A multiple-beam interference model is used to derive approximate formulae for the reflection and transmission coefficients of inhomogeneous thin films exhibiting large gradients of refractive index profiles. It is shown that these formulae are constituted by series containing the Wentzel-Kramers-Brillouin-Jeffreys term and correction terms with increasing order corresponding to number of considered internal reflections inside the films. A numerical analysis enabling us to show the influence of a degree of inhomogeneity on spectral dependencies of reflectance and ellipsometric parameters of inhomogeneous films is performed. Advantages and disadvantages of our approach compared with other approximate approaches are discussed. The optical characterization of a selected non-stoichiometric silicon nitride film prepared by reactive magnetron sputtering onto silicon single crystal substrate is performed for illustration of using our formulae in practice.
ER  -

OHLÍDAL, Ivan; Jiří VOHÁNKA; Jan MISTRÍK; Martin ČERMÁK; František VIŽĎA a Daniel FRANTA. Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model. \textit{Thin Solid Films}. Elsevier, 2019, roč.~692, 31 December 2019, s.~1-17. ISSN~0040-6090. Dostupné z: https://doi.org/10.1016/j.tsf.2019.03.001.

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