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@proceedings{1609521,
author = {Klein, Peter and Hnilica, Jaroslav and Fekete, Matej and Vašina, Petr},
booktitle = {International Conference on Reactive Sputter Deposition},
keywords = {HiPIMS; Spoke; Reactive sputtering},
language = {eng},
title = {Spoke behaviour in reactive HiPIMS},
year = {2019}
}
TY - CONF
ID - 1609521
AU - Klein, Peter - Hnilica, Jaroslav - Fekete, Matej - Vašina, Petr
PY - 2019
TI - Spoke behaviour in reactive HiPIMS
KW - HiPIMS
KW - Spoke
KW - Reactive sputtering
N2 - Plasma in high-power impulse magnetron sputtering (HiPIMS) discharge, similarly to other discharges utilizing ExB field (Hall thrusters, homopolar devices), undergoes self-organization into the ionization zones rotating in the ExB direction, called spokes [1]. Many studies were conducted focusing on the characterization of their appearance, number, rotational velocity, merging and splitting events in different experimental conditions. Nevertheless, only very little research was conducted in the case of reactive sputtering, where only general spoke characteristics were evaluated [2]. A dual-image fast camera screening was utilized to capture plasma emission on 3” Nb target in a reactive mixture of nitrogen and argon. Spoke characteristics were evaluated while overall pressure and supplied power was kept constant and the ratio of N2/Ar was varied. The shape, velocity and spoke number were significantly affected by higher ratio of N2 in the mixture. To distinguish between the effects of the poisoned target and reactive gas present in the plasma on spokes, plasma emission was screened as the Nb target was cleaned in pure Ar atmosphere. Additionally, obtained spoke characteristics were compared to those made on a fully compound NbN target. [1] A. Hecimovic A, A von Keudell, Journal of Physics D: Applied Physics 51 (2018) 453001 [2] A. Hecimovic, C. Corbella, C. Maszl, W. Breilmann, A. and von Keudell, Journal of Applied Physics 121 (2017) 171915
ER -
KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE a Petr VAŠINA. Spoke behaviour in reactive HiPIMS. In \textit{International Conference on Reactive Sputter Deposition}. 2019.
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