2019
Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture
ANGUŠ, Michal; Lucie BLAHOVÁ; Miroslav MICHLÍČEK a Lenka ZAJÍČKOVÁZákladní údaje
Originální název
Optical Emission Spectroscopy of Argon and Argon Cyclopropylamine Mixture
Autoři
ANGUŠ, Michal; Lucie BLAHOVÁ; Miroslav MICHLÍČEK a Lenka ZAJÍČKOVÁ
Vydání
1st Annual CEITEC Postdoc Retreat, 2019
Další údaje
Jazyk
angličtina
Typ výsledku
Konferenční abstrakt
Obor
10403 Physical chemistry
Stát vydavatele
Česká republika
Utajení
není předmětem státního či obchodního tajemství
Označené pro přenos do RIV
Ano
Kód RIV
RIV/00216224:14740/19:00113364
Organizační jednotka
Středoevropský technologický institut
Klíčová slova anglicky
Optical Emission Spectroscopy; Argon and Argon Cyclopropylamine Mixture
Štítky
Změněno: 26. 3. 2020 21:27, Mgr. Pavla Foltynová, Ph.D.
Anotace
V originále
Optical emission spectroscopy is a technique for analysis of optical radiation from plasma source (or other light sources). In this contribution we are studying light emission from argon and argon cyclopropylamine (CPA) mixture in capacitively coupled plasma generated in plasma enhanced chemical vapor deposition reactor R4 at CEITEC Nano. Pressure inside of the reactor was 50 Pa (Ar flow 10 sccm and for mixture Ar flow 10 sccm and CPA flow 1 sccm) and power was set for 5 W and 50 W for both cases. Recording of spectra was done using Andor Shamrock SR-500i coupled with Newton 971 EMCCD spectroscopic detector. Measured spectral range was from 200 nm to 1000 nm. In all measured spectra we focused on detection and identification of Argon atomic lines. In Ar–CPA mixture we observe emission of molecular fragments as well. Plasma parameter (electron temperature) using Boltzmann plot have been estimated. All argon atomic line parameters have been taken from NIST atomic spectra database1. From the results we can observe similar electron temperature for 5 W and 50 W measurements, but slight increase of temperature in case of Ar-CPA mixture.
Návaznosti
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