Study of the transition from self-organised to homogeneous
plasma distribution in chromium HiPIMS discharge

J 2020

Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge

ŠLAPANSKÁ, Marta; Ante HECIMOVIC; Jon Tomas GUDMUNDSSON; Jaroslav HNILICA; Wolfgang BREILMANN et al.

Základní údaje

Originální název

Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge

Autoři

ŠLAPANSKÁ, Marta; Ante HECIMOVIC; Jon Tomas GUDMUNDSSON; Jaroslav HNILICA; Wolfgang BREILMANN; Petr VAŠINA a Achim VON KEUDELL

Vydání

Journal of physics D: Applied physics, Bristol, England, IOP Publishing Ltd. 2020, 0022-3727

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.207

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/20:00114148

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

HiPIMS; Ohmic heating; optical emission spectroscopy; mass spectrometry; spokes; chromium

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 29. 2. 2024 13:56, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse magnetron sputtering (HiPIMS) discharge. For some target materials and non-reactive gases, it was observed that at very high power densities (>3 kW cm(-2)) the plasma exhibits a transition from a regime where spokes are observed to a homogeneous plasma regime. In this contribution, we present a comparison of plasma properties: plasma emission (optical emission spectroscopy) and flux of argon and chromium ions (mass spectrometry), measured both in the spoke regime and in the homogeneous plasma regime, aimed to expand the understanding of the plasma transition between the two modes. A simple biased flat probe was used to distinguish between the spoke regime and the homogeneous plasma regime. It was found that the flux of multiply charged ions (Ar2+, Cr2+, Cr3+, Cr4+) increases abruptly at the transition between the spoke regime and the homogeneous plasma regime. Similarly, the emission from Cr+ ions exhibits a strong increase of about 50% when the plasma torus becomes homogeneous. These observations are interpreted as an increase in electron temperature and a change in the electron heating mode, from a combination of secondary electron heating and Ohmic heating towards pure Ohmic heating. The transition to the homogeneous plasma regime and pure Ohmic heating is only observed in non-reactive HiPIMS discharges for target atoms with the second ionisation potential higher than the first ionisation potential of Ar (15.76 eV), and a self-sputter yield larger than 1.

Návaznosti

GA19-00579S, projekt VaV

Název: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

Investor: Grantová agentura ČR, Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

ŠLAPANSKÁ, Marta; Ante HECIMOVIC; Jon Tomas GUDMUNDSSON; Jaroslav HNILICA; Wolfgang BREILMANN; Petr VAŠINA a Achim VON KEUDELL. Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge. Journal of physics D: Applied physics. Bristol, England: IOP Publishing Ltd., 2020, roč. 53, č. 15, s. 1-10. ISSN 0022-3727. Dostupné z: https://doi.org/10.1088/1361-6463/ab6a8c.

@article{1657636,
   author = {Šlapanská, Marta and Hecimovic, Ante and Gudmundsson, Jon Tomas and Hnilica, Jaroslav and Breilmann, Wolfgang and Vašina, Petr and von Keudell, Achim},
   article_location = {Bristol, England},
   article_number = {15},
   doi = {https://doi.org/10.1088/1361-6463/ab6a8c},
   keywords = {HiPIMS; Ohmic heating; optical emission spectroscopy; mass spectrometry; spokes; chromium},
   language = {eng},
   issn = {0022-3727},
   journal = {Journal of physics D: Applied physics},
   title = {Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge},
   url = {https://iopscience.iop.org/article/10.1088/1361-6463/ab6a8c/pdf},
   volume = {53},
   year = {2020}
}

TY  - JOUR
ID  - 1657636
AU  - Šlapanská, Marta - Hecimovic, Ante - Gudmundsson, Jon Tomas - Hnilica, Jaroslav - Breilmann, Wolfgang - Vašina, Petr - von Keudell, Achim
PY  - 2020
TI  - Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge
JF  - Journal of physics D: Applied physics
VL  - 53
IS  - 15
SP  - 1-10
EP  - 1-10
PB  - IOP Publishing Ltd.
SN  - 00223727
KW  - HiPIMS
KW  - Ohmic heating
KW  - optical emission spectroscopy
KW  - mass spectrometry
KW  - spokes
KW  - chromium
UR  - https://iopscience.iop.org/article/10.1088/1361-6463/ab6a8c/pdf
L2  - https://iopscience.iop.org/article/10.1088/1361-6463/ab6a8c/pdf
N2  - The self-organised plasma patterns, known as spokes or ionisation zones in magnetron sputtering discharges, were observed in a wide range of power densities, from low power direct current magnetron sputtering (dcMS) discharge to high power impulse magnetron sputtering (HiPIMS) discharge. For some target materials and non-reactive gases, it was observed that at very high power densities (>3 kW cm(-2)) the plasma exhibits a transition from a regime where spokes are observed to a homogeneous plasma regime. In this contribution, we present a comparison of plasma properties: plasma emission (optical emission spectroscopy) and flux of argon and chromium ions (mass spectrometry), measured both in the spoke regime and in the homogeneous plasma regime, aimed to expand the understanding of the plasma transition between the two modes. A simple biased flat probe was used to distinguish between the spoke regime and the homogeneous plasma regime. It was found that the flux of multiply charged ions (Ar2+, Cr2+, Cr3+, Cr4+) increases abruptly at the transition between the spoke regime and the homogeneous plasma regime. Similarly, the emission from Cr+ ions exhibits a strong increase of about 50% when the plasma torus becomes homogeneous. These observations are interpreted as an increase in electron temperature and a change in the electron heating mode, from a combination of secondary electron heating and Ohmic heating towards pure Ohmic heating. The transition to the homogeneous plasma regime and pure Ohmic heating is only observed in non-reactive HiPIMS discharges for target atoms with the second ionisation potential higher than the first ionisation potential of Ar (15.76 eV), and a self-sputter yield larger than 1.
ER  -

ŠLAPANSKÁ, Marta; Ante HECIMOVIC; Jon Tomas GUDMUNDSSON; Jaroslav HNILICA; Wolfgang BREILMANN; Petr VAŠINA a Achim VON KEUDELL. Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge. \textit{Journal of physics D: Applied physics}. Bristol, England: IOP Publishing Ltd., 2020, roč.~53, č.~15, s.~1-10. ISSN~0022-3727. Dostupné z: https://doi.org/10.1088/1361-6463/ab6a8c.

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