Effect of substrate bias voltage on the composition,
microstructure andmechanical properties of W-B-C coatings

J 2020

Effect of substrate bias voltage on the composition, microstructure andmechanical properties of W-B-C coatings

MIRZAEI, Saeed, Mostafa ALISHAHI, Pavel SOUČEK, Vilma BURŠÍKOVÁ, Lukáš ZÁBRANSKÝ et. al.

Základní údaje

Originální název

Effect of substrate bias voltage on the composition, microstructure andmechanical properties of W-B-C coatings

Autoři

MIRZAEI, Saeed (364 Írán, garant, domácí), Mostafa ALISHAHI (364 Írán, domácí), Pavel SOUČEK (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí), Lukáš ZÁBRANSKÝ (203 Česká republika, domácí), Lukas GRÖNER (276 Německo), Frank BURMEISTER (276 Německo), Bernhard BLUG, Philipp DAUM (276 Německo), Romana MIKŠOVÁ (203 Česká republika) a Petr VAŠINA (203 Česká republika, domácí)

Vydání

Applied Surface Science, Amsterdam, Elsevier Science, 2020, 0169-4332

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Nizozemské království

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 6.707

Kód RIV

RIV/00216224:14310/20:00114244

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.apsusc.2020.146966

UT WoS

000576738900007

Klíčová slova anglicky

magnetron sputtering; protective coatings; substrate bias; W-B-C alloys; fracture resistance

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 29. 2. 2024 13:49, Mgr. Marie Šípková, DiS.

Anotace

V originále

Commercial ceramic protective coatings usually exhibit high hardness, but low ductility impairs their perfor-mance and application-oriented properties. Accordingly, a state-of-the-art magnetron sputtered W-B-C coating can be a promising coating for the tooling industry due to its hard yet tough characteristics.In the present study,we have employed substrate biasing to enhance the delivered energy to the growing film and have investigatedthe effect of bias voltage on the structural and mechanical behavior of W-B-C coatings. The investigations re-vealed that increasing the substrate bias voltage enhanced the re-sputtering of B and C atoms and subsequently varied the chemical composition of the coatings and significantly decreased the growthrate. It also enhanced the crystallinity of the coatings. We demonstrate how the bias voltage led to an unusual transition from a featureless to a columnar microstructure. Furthermore, it was observed that as the substrate bias voltage increased from 0V to -125V, the compositional and structural changes resulted in a slight decrease of the hardness, while a further increase in the biasvoltage to -200V enhanced the hardness. This increase was attributed to the suppression of dislocation movement and grain boundary deformation processes by solute segregation and by lattice defects.

Návaznosti

GA19-03899S, projekt VaV

Název: Nanolaminátní vrstvy připravené magnetronovým naprašováním - perspektivní tvrdý materiál se zvýšenou lomovou houževnatostí

Investor: Grantová agentura ČR, Nanolaminátní vrstvy připravené magnetronovým naprašováním - perspektivní tvrdý materiál se zvýšenou lomovou houževnatostí

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

MIRZAEI, Saeed, Mostafa ALISHAHI, Pavel SOUČEK, Vilma BURŠÍKOVÁ, Lukáš ZÁBRANSKÝ, Lukas GRÖNER, Frank BURMEISTER, Bernhard BLUG, Philipp DAUM, Romana MIKŠOVÁ a Petr VAŠINA. Effect of substrate bias voltage on the composition, microstructure andmechanical properties of W-B-C coatings. Applied Surface Science. Amsterdam: Elsevier Science, 2020, roč. 528, OCT 30 2020, s. 1-9. ISSN 0169-4332. Dostupné z: https://dx.doi.org/10.1016/j.apsusc.2020.146966.

@article{1672056,
   author = {Mirzaei, Saeed and Alishahi, Mostafa and Souček, Pavel and Buršíková, Vilma and Zábranský, Lukáš and Gröner, Lukas and Burmeister, Frank and Blug, Bernhard and Daum, Philipp and Mikšová, Romana and Vašina, Petr},
   article_location = {Amsterdam},
   article_number = {OCT 30 2020},
   doi = {http://dx.doi.org/10.1016/j.apsusc.2020.146966},
   keywords = {magnetron sputtering; protective coatings; substrate bias; W-B-C alloys; fracture resistance},
   language = {eng},
   issn = {0169-4332},
   journal = {Applied Surface Science},
   title = {Effect of substrate bias voltage on the composition, microstructure andmechanical properties of W-B-C coatings},
   url = {https://doi.org/10.1016/j.apsusc.2020.146966},
   volume = {528},
   year = {2020}
}

TY  - JOUR
ID  - 1672056
AU  - Mirzaei, Saeed - Alishahi, Mostafa - Souček, Pavel - Buršíková, Vilma - Zábranský, Lukáš - Gröner, Lukas - Burmeister, Frank - Blug, Bernhard - Daum, Philipp - Mikšová, Romana - Vašina, Petr
PY  - 2020
TI  - Effect of substrate bias voltage on the composition, microstructure andmechanical properties of W-B-C coatings
JF  - Applied Surface Science
VL  - 528
IS  - OCT 30 2020
SP  - 1-9
EP  - 1-9
PB  - Elsevier Science
SN  - 01694332
KW  - magnetron sputtering
KW  - protective coatings
KW  - substrate bias
KW  - W-B-C alloys
KW  - fracture resistance
UR  - https://doi.org/10.1016/j.apsusc.2020.146966
L2  - https://doi.org/10.1016/j.apsusc.2020.146966
N2  - Commercial ceramic protective coatings usually exhibit high hardness, but low ductility impairs their perfor-mance and application-oriented properties. Accordingly, a state-of-the-art magnetron sputtered W-B-C coating can be a promising coating for the tooling industry due to its hard yet tough characteristics.In the present study,we have employed substrate biasing to enhance the delivered energy to the growing film and have investigatedthe effect of bias voltage on the structural and mechanical behavior of W-B-C coatings. The investigations re-vealed that increasing the substrate bias voltage enhanced the re-sputtering of B and C atoms and subsequently varied the chemical composition of the coatings and significantly decreased the growthrate. It also enhanced the crystallinity of the coatings. We demonstrate how the bias voltage led to an unusual transition from a featureless to a columnar microstructure. Furthermore, it was observed that as the substrate bias voltage increased from 0V to -125V, the compositional and structural changes resulted in a slight decrease of the hardness, while a further increase in the biasvoltage to -200V enhanced the hardness. This increase was attributed to the suppression of dislocation movement and grain boundary deformation processes by solute segregation and by lattice defects.
ER  -

MIRZAEI, Saeed, Mostafa ALISHAHI, Pavel SOUČEK, Vilma BURŠÍKOVÁ, Lukáš ZÁBRANSKÝ, Lukas GRÖNER, Frank BURMEISTER, Bernhard BLUG, Philipp DAUM, Romana MIKŠOVÁ a Petr VAŠINA. Effect of substrate bias voltage on the composition, microstructure andmechanical properties of W-B-C coatings. \textit{Applied Surface Science}. Amsterdam: Elsevier Science, 2020, roč.~528, OCT 30 2020, s.~1-9. ISSN~0169-4332. Dostupné z: https://dx.doi.org/10.1016/j.apsusc.2020.146966.

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