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@article{1672958,
author = {Hnilica, Jaroslav and Klein, Peter and Vašina, Petr and Snyders, Rony and Britun, Nikolay},
article_number = {4},
doi = {http://dx.doi.org/10.1063/5.0009378},
keywords = {magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process; LIF; AAS},
language = {eng},
issn = {0021-8979},
journal = {Journal of applied physics},
title = {Revisiting particle dynamics in HiPIMS discharges. I. General effects},
url = {http://aip.scitation.org/doi/10.1063/5.0009378},
volume = {128},
year = {2020}
}
TY - JOUR
ID - 1672958
AU - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr - Snyders, Rony - Britun, Nikolay
PY - 2020
TI - Revisiting particle dynamics in HiPIMS discharges. I. General effects
JF - Journal of applied physics
VL - 128
IS - 4
SP - 1-14
EP - 1-14
PB - American Institute of Physics
SN - 00218979
KW - magnetron sputtering
KW - HiPIMS
KW - spectroscopy
KW - plasma diagnostics
KW - sputtering process
KW - LIF
KW - AAS
UR - http://aip.scitation.org/doi/10.1063/5.0009378
L2 - http://aip.scitation.org/doi/10.1063/5.0009378
N2 - A detailed experimental study of high power impulse magnetron sputtering processes is performed by time-resolved imaging of the ground state sputtered particles. New details related to the behavior of both neutral and singly ionized atoms are shown, as a result of separate treatment of the plasma-on and plasma-off time phases. In Paper I, the ion/neutral density redistribution in the ionization zone during sputtering is analyzed; the role of main discharge parameters, such as pulse repetition rate, pulse energy, etc., is discussed systematically. The time-resolved evolution of the ground state levels population for both sputtered neutrals and ions is also considered. In addition, propagation of the sputtered particles is analyzed using 2D density gradient diagrams calculated based on the measured particle density distributions. The results of this work are compared, when possible, to the data obtained previously [Britun et al., J. Appl. Phys. 117, 163302 (2015)].
ER -
HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS a Nikolay BRITUN. Revisiting particle dynamics in HiPIMS discharges. I. General effects. \textit{Journal of applied physics}. American Institute of Physics, 2020, roč.~128, č.~4, s.~1-14. ISSN~0021-8979. Dostupné z: https://dx.doi.org/10.1063/5.0009378.
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