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@article{1672959,
author = {Hnilica, Jaroslav and Klein, Peter and Vašina, Petr and Snyders, Rony and Britun, Nikolay},
article_location = {New York},
article_number = {4},
doi = {http://dx.doi.org/10.1063/5.0009380},
keywords = {magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process; LIF; AAS},
language = {eng},
issn = {0021-8979},
journal = {Journal of Applied Physics},
title = {Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects},
url = {http://aip.scitation.org/doi/10.1063/5.0009380},
volume = {128},
year = {2020}
}
TY - JOUR
ID - 1672959
AU - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr - Snyders, Rony - Britun, Nikolay
PY - 2020
TI - Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects
JF - Journal of Applied Physics
VL - 128
IS - 4
SP - 1-12
EP - 1-12
PB - American Institute of Physics
SN - 00218979
KW - magnetron sputtering
KW - HiPIMS
KW - spectroscopy
KW - plasma diagnostics
KW - sputtering process
KW - LIF
KW - AAS
UR - http://aip.scitation.org/doi/10.1063/5.0009380
L2 - http://aip.scitation.org/doi/10.1063/5.0009380
N2 - A detailed experimental study of high power impulse magnetron sputtering discharges is performed using time-resolved ground state density mapping of the sputtered neutrals and ions. This Paper deals with the effects related to the plasma-on phase and can be considered as an extension of Paper I being published simultaneously. The influence of plasma pulse duration, pulse energy, gas pressure as well as molecular oxygen admixture on the spatial and temporal particle density evolution is examined. Special attention is given to the temporal evolution of the ionization fraction distribution of the sputtered atoms. In addition, the 2D vector maps reflecting particle propagation, sputtering, and ionization in the discharge volume are also presented and discussed, similarly to the first part of this study [J. Appl. Phys. 128, 043303 (2020)].
ER -
HNILICA, Jaroslav, Peter KLEIN, Petr VAŠINA, Rony SNYDERS a Nikolay BRITUN. Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects. \textit{Journal of Applied Physics}. New York: American Institute of Physics, roč.~128, č.~4, s.~1-12. ISSN~0021-8979. doi:10.1063/5.0009380. 2020.
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