Revisiting particle dynamics in HiPIMS discharges. II. Plasma
pulse effects

J 2020

Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects

HNILICA, Jaroslav; Peter KLEIN; Petr VAŠINA; Rony SNYDERS; Nikolay BRITUN et al.

Základní údaje

Originální název

Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects

Autoři

HNILICA, Jaroslav; Peter KLEIN; Petr VAŠINA; Rony SNYDERS a Nikolay BRITUN

Vydání

Journal of Applied Physics, New York, American Institute of Physics, 2020, 0021-8979

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.546

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/20:00114257

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process; LIF; AAS

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 27. 2. 2024 15:39, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

A detailed experimental study of high power impulse magnetron sputtering discharges is performed using time-resolved ground state density mapping of the sputtered neutrals and ions. This Paper deals with the effects related to the plasma-on phase and can be considered as an extension of Paper I being published simultaneously. The influence of plasma pulse duration, pulse energy, gas pressure as well as molecular oxygen admixture on the spatial and temporal particle density evolution is examined. Special attention is given to the temporal evolution of the ionization fraction distribution of the sputtered atoms. In addition, the 2D vector maps reflecting particle propagation, sputtering, and ionization in the discharge volume are also presented and discussed, similarly to the first part of this study [J. Appl. Phys. 128, 043303 (2020)].

Návaznosti

GA15-00863S, projekt VaV

Název: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

Investor: Grantová agentura ČR, Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

HNILICA, Jaroslav; Peter KLEIN; Petr VAŠINA; Rony SNYDERS a Nikolay BRITUN. Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects. Journal of Applied Physics. New York: American Institute of Physics, 2020, roč. 128, č. 4, s. 1-12. ISSN 0021-8979. Dostupné z: https://doi.org/10.1063/5.0009380.

@article{1672959,
   author = {Hnilica, Jaroslav and Klein, Peter and Vašina, Petr and Snyders, Rony and Britun, Nikolay},
   article_location = {New York},
   article_number = {4},
   doi = {https://doi.org/10.1063/5.0009380},
   keywords = {magnetron sputtering; HiPIMS; spectroscopy; plasma diagnostics; sputtering process; LIF; AAS},
   language = {eng},
   issn = {0021-8979},
   journal = {Journal of Applied Physics},
   title = {Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects},
   url = {http://aip.scitation.org/doi/10.1063/5.0009380},
   volume = {128},
   year = {2020}
}

TY  - JOUR
ID  - 1672959
AU  - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr - Snyders, Rony - Britun, Nikolay
PY  - 2020
TI  - Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects
JF  - Journal of Applied Physics
VL  - 128
IS  - 4
SP  - 1-12
EP  - 1-12
PB  - American Institute of Physics
SN  - 00218979
KW  - magnetron sputtering
KW  - HiPIMS
KW  - spectroscopy
KW  - plasma diagnostics
KW  - sputtering process
KW  - LIF
KW  - AAS
UR  - http://aip.scitation.org/doi/10.1063/5.0009380
L2  - http://aip.scitation.org/doi/10.1063/5.0009380
N2  - A detailed experimental study of high power impulse magnetron sputtering discharges is performed using time-resolved ground state density mapping of the sputtered neutrals and ions. This Paper deals with the effects related to the plasma-on phase and can be considered as an extension of Paper I being published simultaneously. The influence of plasma pulse duration, pulse energy, gas pressure as well as molecular oxygen admixture on the spatial and temporal particle density evolution is examined. Special attention is given to the temporal evolution of the ionization fraction distribution of the sputtered atoms. In addition, the 2D vector maps reflecting particle propagation, sputtering, and ionization in the discharge volume are also presented and discussed, similarly to the first part of this study [J. Appl. Phys. 128, 043303 (2020)].
ER  -

HNILICA, Jaroslav; Peter KLEIN; Petr VAŠINA; Rony SNYDERS a Nikolay BRITUN. Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects. \textit{Journal of Applied Physics}. New York: American Institute of Physics, 2020, roč.~128, č.~4, s.~1-12. ISSN~0021-8979. Dostupné z: https://doi.org/10.1063/5.0009380.

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