Composition, Structure and Mechanical Properties of
Industrially Sputtered Ta-B-C Coatings

J 2020

Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings

KROKER, Michael; Pavel SOUČEK; Pavol MATEJ; Lukáš ZÁBRANSKÝ; Zsolt CZIGÁNY et al.

Základní údaje

Originální název

Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings

Autoři

KROKER, Michael; Pavel SOUČEK; Pavol MATEJ; Lukáš ZÁBRANSKÝ; Zsolt CZIGÁNY; Katalin BALAZSI a Petr VAŠINA

Vydání

Coatings, Basel, MDPI, 2020, 2079-6412

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.881

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/20:00114424

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

magnetron sputtering; industrial process; segmented target; TaBC; phase composition; structure; mechanical properties

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 27. 2. 2024 15:43, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

Ta-B-C coatings were non-reactively sputter-deposited in an industrial batch coater from a single segmented rotating cylindrical cathode employing a combinatorial approach. The chemical composition, morphology, microstructure, mechanical properties, and fracture resistance of the coatings were investigated. Their mechanical properties were linked to their microstructure and phase composition. Coatings placed stationary in front of the racetrack of the target and those performing a 1-axis rotation around the substrate carousel are compared. Utilization of the substrate rotation has no significant effect on the chemical composition of the coatings deposited at the same position compared to the cathode. Whereas the morphology of coatings with corresponding chemical composition is similar for stationary as well as rotating samples, the rotating coatings exhibit a distinct multilayered structure with a repetition period in the range of nanometers despite utilizing a non-reactive process and a single sputter source. All the coatings are either amorphous, nanocomposite or nanocrystalline depending on their chemical composition. The presence of TaC, TaB, and/or TaB2phases is identified. The crystallite size is typically less than 5 nm. The highest hardness of the coatings is associated with the presence of larger grains in a nanocomposite structure or formation of polycrystalline coatings. The number, density, and length of cracks observed after high-load indentation is on par with current optimized commercially available protective coatings.

Návaznosti

FV30262, projekt VaV

Název: Vývoj průmyslové technologie pro depozice tvrdých XBC a TiXN povlaků se zvýšenou lomovou houževnatostí

Investor: Ministerstvo průmyslu a obchodu ČR, Vývoj průmyslové technologie pro depozice tvrdých XBC a TiXN povlaků se zvýšenou lomovou houževnatostí

GA19-03899S, projekt VaV

Název: Nanolaminátní vrstvy připravené magnetronovým naprašováním - perspektivní tvrdý materiál se zvýšenou lomovou houževnatostí

Investor: Grantová agentura ČR, Nanolaminátní vrstvy připravené magnetronovým naprašováním - perspektivní tvrdý materiál se zvýšenou lomovou houževnatostí

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

KROKER, Michael; Pavel SOUČEK; Pavol MATEJ; Lukáš ZÁBRANSKÝ; Zsolt CZIGÁNY; Katalin BALAZSI a Petr VAŠINA. Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings. Coatings. Basel: MDPI, 2020, roč. 10, č. 9, s. 1-18. ISSN 2079-6412. Dostupné z: https://doi.org/10.3390/coatings10090853.

@article{1688888,
   author = {Kroker, Michael and Souček, Pavel and Matej, Pavol and Zábranský, Lukáš and Czigány, Zsolt and Balazsi, Katalin and Vašina, Petr},
   article_location = {Basel},
   article_number = {9},
   doi = {https://doi.org/10.3390/coatings10090853},
   keywords = {magnetron sputtering; industrial process; segmented target; TaBC; phase composition; structure; mechanical properties},
   language = {eng},
   issn = {2079-6412},
   journal = {Coatings},
   title = {Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings},
   url = {https://doi.org/10.3390/coatings10090853},
   volume = {10},
   year = {2020}
}

TY  - JOUR
ID  - 1688888
AU  - Kroker, Michael - Souček, Pavel - Matej, Pavol - Zábranský, Lukáš - Czigány, Zsolt - Balazsi, Katalin - Vašina, Petr
PY  - 2020
TI  - Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings
JF  - Coatings
VL  - 10
IS  - 9
SP  - 1-18
EP  - 1-18
PB  - MDPI
SN  - 20796412
KW  - magnetron sputtering
KW  - industrial process
KW  - segmented target
KW  - TaBC
KW  - phase composition
KW  - structure
KW  - mechanical properties
UR  - https://doi.org/10.3390/coatings10090853
L2  - https://doi.org/10.3390/coatings10090853
N2  - Ta-B-C coatings were non-reactively sputter-deposited in an industrial batch coater from a single segmented rotating cylindrical cathode employing a combinatorial approach. The chemical composition, morphology, microstructure, mechanical properties, and fracture resistance of the coatings were investigated. Their mechanical properties were linked to their microstructure and phase composition. Coatings placed stationary in front of the racetrack of the target and those performing a 1-axis rotation around the substrate carousel are compared. Utilization of the substrate rotation has no significant effect on the chemical composition of the coatings deposited at the same position compared to the cathode. Whereas the morphology of coatings with corresponding chemical composition is similar for stationary as well as rotating samples, the rotating coatings exhibit a distinct multilayered structure with a repetition period in the range of nanometers despite utilizing a non-reactive process and a single sputter source. All the coatings are either amorphous, nanocomposite or nanocrystalline depending on their chemical composition. The presence of TaC, TaB, and/or TaB2phases is identified. The crystallite size is typically less than 5 nm. The highest hardness of the coatings is associated with the presence of larger grains in a nanocomposite structure or formation of polycrystalline coatings. The number, density, and length of cracks observed after high-load indentation is on par with current optimized commercially available protective coatings.
ER  -

KROKER, Michael; Pavel SOUČEK; Pavol MATEJ; Lukáš ZÁBRANSKÝ; Zsolt CZIGÁNY; Katalin BALAZSI a Petr VAŠINA. Composition, Structure and Mechanical Properties of Industrially Sputtered Ta-B-C Coatings. \textit{Coatings}. Basel: MDPI, 2020, roč.~10, č.~9, s.~1-18. ISSN~2079-6412. Dostupné z: https://doi.org/10.3390/coatings10090853.

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