Selective Plasma Etching of Polymer-Metal Mesh Foil in
Large-Area Hydrogen Atmospheric Pressure Plasma

J 2020

Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma

KRUMPOLEC, Richard; Jana JURMANOVÁ; Miroslav ZEMÁNEK; Jakub KELAR; Dušan KOVÁČIK et al.

Základní údaje

Originální název

Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma

Autoři

KRUMPOLEC, Richard ; Jana JURMANOVÁ; Miroslav ZEMÁNEK; Jakub KELAR; Dušan KOVÁČIK a Mirko ČERNÁK

Vydání

Applied Sciences, Basel, MDPI, 2020, 2076-3417

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.679

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/20:00114855

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

hydrogen plasma; atmospheric pressure plasma; selective etching; polymer-metal mesh composite foil; roll-to-roll processing

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 29. 4. 2021 17:28, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

We present a novel method of surface processing of complex polymer-metal composite substrates. Atmospheric-pressure plasma etching in pure H-2, N-2, H-2/N-2 and air plasmas was used to fabricate flexible transparent composite poly(methyl methacrylate) (PMMA)-based polymer film/Ag-coated Cu metal wire mesh substrates with conductive connection sites by the selective removal of the thin (similar to 10-100 nm) surface PMMA layer. To mimic large-area roll-to-roll processing, we used an advanced alumina-based concavely curved electrode generating a thin and high-power density cold plasma layer by the diffuse coplanar surface barrier discharge. A short 1 s exposure to pure hydrogen plasma, led to successful highly-selective etching of the surface PMMA film without any destruction of the Ag-coated Cu metal wires embedded in the PMMA polymer. On the other hand, the use of ambient air, pure nitrogen and H-2/N-2 plasmas resulted in undesired degradation both of the polymer and the metal wires surfaces. Since it was found that the etching efficiency strongly depends on the process parameters, such as treatment time and the distance from the electrode surface, we studied the effect and performance of these parameters.

Návaznosti

LM2018097, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

TJ01000327, projekt VaV

Název: Komercializace redukčního plazmatu generovaného při atmosférickém tlaku pro in-line průmyslné aplikace

Investor: Technologická agentura ČR, Komercializace redukčního plazmatu generovaného při atmosférickém tlaku pro in-line průmyslné aplikace

Citovat

KRUMPOLEC, Richard; Jana JURMANOVÁ; Miroslav ZEMÁNEK; Jakub KELAR; Dušan KOVÁČIK a Mirko ČERNÁK. Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma. Applied Sciences. Basel: MDPI, 2020, roč. 10, č. 20, s. 1-11. ISSN 2076-3417. Dostupné z: https://doi.org/10.3390/app10207356.

@article{1691637,
   author = {Krumpolec, Richard and Jurmanová, Jana and Zemánek, Miroslav and Kelar, Jakub and Kováčik, Dušan and Černák, Mirko},
   article_location = {Basel},
   article_number = {20},
   doi = {https://doi.org/10.3390/app10207356},
   keywords = {hydrogen plasma; atmospheric pressure plasma; selective etching; polymer-metal mesh composite foil; roll-to-roll processing},
   language = {eng},
   issn = {2076-3417},
   journal = {Applied Sciences},
   title = {Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma},
   url = {https://doi.org/10.3390/app10207356},
   volume = {10},
   year = {2020}
}

TY  - JOUR
ID  - 1691637
AU  - Krumpolec, Richard - Jurmanová, Jana - Zemánek, Miroslav - Kelar, Jakub - Kováčik, Dušan - Černák, Mirko
PY  - 2020
TI  - Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma
JF  - Applied Sciences
VL  - 10
IS  - 20
SP  - 1-11
EP  - 1-11
PB  - MDPI
SN  - 20763417
KW  - hydrogen plasma
KW  - atmospheric pressure plasma
KW  - selective etching
KW  - polymer-metal mesh composite foil
KW  - roll-to-roll processing
UR  - https://doi.org/10.3390/app10207356
L2  - https://doi.org/10.3390/app10207356
N2  - We present a novel method of surface processing of complex polymer-metal composite substrates. Atmospheric-pressure plasma etching in pure H-2, N-2, H-2/N-2 and air plasmas was used to fabricate flexible transparent composite poly(methyl methacrylate) (PMMA)-based polymer film/Ag-coated Cu metal wire mesh substrates with conductive connection sites by the selective removal of the thin (similar to 10-100 nm) surface PMMA layer. To mimic large-area roll-to-roll processing, we used an advanced alumina-based concavely curved electrode generating a thin and high-power density cold plasma layer by the diffuse coplanar surface barrier discharge. A short 1 s exposure to pure hydrogen plasma, led to successful highly-selective etching of the surface PMMA film without any destruction of the Ag-coated Cu metal wires embedded in the PMMA polymer. On the other hand, the use of ambient air, pure nitrogen and H-2/N-2 plasmas resulted in undesired degradation both of the polymer and the metal wires surfaces. Since it was found that the etching efficiency strongly depends on the process parameters, such as treatment time and the distance from the electrode surface, we studied the effect and performance of these parameters.
ER  -

KRUMPOLEC, Richard; Jana JURMANOVÁ; Miroslav ZEMÁNEK; Jakub KELAR; Dušan KOVÁČIK a Mirko ČERNÁK. Selective Plasma Etching of Polymer-Metal Mesh Foil in Large-Area Hydrogen Atmospheric Pressure Plasma. \textit{Applied Sciences}. Basel: MDPI, 2020, roč.~10, č.~20, s.~1-11. ISSN~2076-3417. Dostupné z: https://doi.org/10.3390/app10207356.

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