Ellipsometric characterization of highly non-uniform thin films
with the shape of thickness non-uniformity modeled by
polynomials

J 2020

Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials

VOHÁNKA, Jiří; Daniel FRANTA; Martin ČERMÁK; Vojtěch HOMOLA; Vilma BURŠÍKOVÁ et al.

Základní údaje

Originální název

Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials

Autoři

VOHÁNKA, Jiří; Daniel FRANTA; Martin ČERMÁK; Vojtěch HOMOLA; Vilma BURŠÍKOVÁ a Ivan OHLÍDAL

Vydání

Optics Express, Washington, D.C. Optical Society of America, 2020, 1094-4087

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

Přeměruje na stránku u nakladatele

Impakt faktor

Impact factor: 3.894

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/20:00114443

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

optical characterization;thickness non-uniform films;ellipsometry

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 20. 11. 2020 13:52, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

A common approach to non-uniformity is to assume that the local thicknesses inside the light spot are distributed according to a certain distribution, such as the uniform distribution or the Wigner semicircle distribution. A model considered in this work uses a different approach in which the local thicknesses are given by a polynomial in the coordinates x and y along the surface of the film. An approach using the Gaussian quadrature is very efficient for including the influence of the non-uniformity on the measured ellipsometric quantities. However, the nodes and weights for the Gaussian quadrature must be calculated numerically if the non-uniformity is parameterized by the second or higher degree polynomial. A method for calculating these nodes and weights which is both efficient and numerically stable is presented. The presented method with a model using a second-degree polynomial is demonstrated on the sample of highly non-uniform polymer-like thin film characterized using variable-angle spectroscopic ellipsometry. The results are compared with those obtained using a model assuming the Wigner semicircle distribution.

Návaznosti

GA19-15240S, projekt VaV

Název: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Grantová agentura ČR, Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

LM2018097, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

VOHÁNKA, Jiří; Daniel FRANTA; Martin ČERMÁK; Vojtěch HOMOLA; Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials. Optics Express. Washington, D.C.: Optical Society of America, 2020, roč. 28, č. 4, s. 5492-5506. ISSN 1094-4087. Dostupné z: https://doi.org/10.1364/OE.380657.

@article{1692056,
   author = {Vohánka, Jiří and Franta, Daniel and Čermák, Martin and Homola, Vojtěch and Buršíková, Vilma and Ohlídal, Ivan},
   article_location = {Washington, D.C.},
   article_number = {4},
   doi = {https://doi.org/10.1364/OE.380657},
   keywords = {optical characterization;thickness non-uniform films;ellipsometry},
   language = {eng},
   issn = {1094-4087},
   journal = {Optics Express},
   title = {Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials},
   url = {https://doi.org/10.1364/OE.380657},
   volume = {28},
   year = {2020}
}

TY  - JOUR
ID  - 1692056
AU  - Vohánka, Jiří - Franta, Daniel - Čermák, Martin - Homola, Vojtěch - Buršíková, Vilma - Ohlídal, Ivan
PY  - 2020
TI  - Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials
JF  - Optics Express
VL  - 28
IS  - 4
SP  - 5492-5506
EP  - 5492-5506
PB  - Optical Society of America
SN  - 10944087
KW  - optical characterization;thickness non-uniform films;ellipsometry
UR  - https://doi.org/10.1364/OE.380657
L2  - https://doi.org/10.1364/OE.380657
N2  - A common approach to non-uniformity is to assume that the local thicknesses inside the light spot are distributed according to a certain distribution, such as the uniform distribution or the Wigner semicircle distribution. A model considered in this work uses a different approach in which the local thicknesses are given by a polynomial in the coordinates x and y along the surface of the film. An approach using the Gaussian quadrature is very efficient for including the influence of the non-uniformity on the measured ellipsometric quantities. However, the nodes and weights for the Gaussian quadrature must be calculated numerically if the non-uniformity is parameterized by the second or higher degree polynomial. A method for calculating these nodes and weights which is both efficient and numerically stable is presented. The presented method with a model using a second-degree polynomial is demonstrated on the sample of highly non-uniform polymer-like thin film characterized using variable-angle spectroscopic ellipsometry. The results are compared with those obtained using a model assuming the Wigner semicircle distribution.
ER  -

VOHÁNKA, Jiří; Daniel FRANTA; Martin ČERMÁK; Vojtěch HOMOLA; Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials. \textit{Optics Express}. Washington, D.C.: Optical Society of America, 2020, roč.~28, č.~4, s.~5492-5506. ISSN~1094-4087. Dostupné z: https://doi.org/10.1364/OE.380657.

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