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@inproceedings{1761557,
author = {Sihelník, Slavomír and Krumpolec, Richard and Stupavská, Monika and Feng, Jianyu and Kosová, Eva and Kelar, Jakub and Zemánek, Miroslav and Kováčik, Dušan and Černák, Mirko},
address = {Ostrava},
booktitle = {NANOCON 2020: 12th International Conference on Nanomaterials - Research & Application},
doi = {http://dx.doi.org/10.37904/nanocon.2020.3717},
keywords = {Atmospheric plasma treatment; ultra-thin flexible glass; wetting; large-area; roll-to-roll},
howpublished = {elektronická verze "online"},
language = {eng},
location = {Ostrava},
isbn = {978-80-87294-98-7},
pages = {305-310},
publisher = {TANGER Ltd.},
title = {Large area cleaning and activation of flexible ultra-thin glass by non-thermal atmospheric-pressure plasma},
url = {https://doi.org/10.37904/nanocon.2020.3717},
year = {2021}
}
TY - JOUR
ID - 1761557
AU - Sihelník, Slavomír - Krumpolec, Richard - Stupavská, Monika - Feng, Jianyu - Kosová, Eva - Kelar, Jakub - Zemánek, Miroslav - Kováčik, Dušan - Černák, Mirko
PY - 2021
TI - Large area cleaning and activation of flexible ultra-thin glass by non-thermal atmospheric-pressure plasma
PB - TANGER Ltd.
CY - Ostrava
SN - 9788087294987
KW - Atmospheric plasma treatment
KW - ultra-thin flexible glass
KW - wetting
KW - large-area
KW - roll-to-roll
UR - https://doi.org/10.37904/nanocon.2020.3717
N2 - Flexible ultra-thin glass is used as a substrate or packaging material in microelectronics engineering, where the level of cleanliness determines the quality of the final product. Surface properties of glass are governed by a surface nano-layer. Besides cleaning from coarse impurities, the demand is also for nano-decontamination, where standard cleaning proves insufficient. In microelectronics and printed flexible electronics, the bonding of thin structures deposited using printed conductive inks on glass substrates is of essential importance. The non-thermal, atmospheric-pressure plasma generated by diffuse coplanar surface barrier discharge (DCSBD) was studied as an effective pre-treatment method for cleaning and activation of glass surfaces, implementable into large-scale in-line manufacturing. Two industrial adaptations of DCSBD system were applied on two types of ultra-thin flexible glass to compare the effects of plasma treatment of glass in both relaxed, and bent state. DCSBD "Air-pillow" with a planar discharge unit is designed for contactless treatment of smooth flat large-area surfaces. A roll reactor with a concavely curved DCSBD unit is intended to exemplify its integration into roll-to-roll manufacturing. The effect of plasma treatment and its stability was analyzed with water contact angle measurement and X-ray photoelectron spectroscopy. Significant wettability improvement was achieved with both applied DCSBD geometries, with better effect uniformity and durability after using the DCSBD in the planar configuration.
ER -
SIHELNÍK, Slavomír, Richard KRUMPOLEC, Monika STUPAVSKÁ, Jianyu FENG, Eva KOSOVÁ, Jakub KELAR, Miroslav ZEMÁNEK, Dušan KOVÁČIK a Mirko ČERNÁK. Large area cleaning and activation of flexible ultra-thin glass by non-thermal atmospheric-pressure plasma. Online. In \textit{NANOCON 2020: 12th International Conference on Nanomaterials - Research \&{} Application}. Ostrava: TANGER Ltd., 2021, s.~305-310. ISBN~978-80-87294-98-7. Dostupné z: https://dx.doi.org/10.37904/nanocon.2020.3717.
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