Single-Shot Spatially Resolved Optical Emission Spectroscopy of
Plasma Species within the Spoke

a 2021

Single-Shot Spatially Resolved Optical Emission Spectroscopy of Plasma Species within the Spoke

ŠLAPANSKÁ, Marta; Michael KROKER; Jaroslav HNILICA; Peter KLEIN; Petr VAŠINA et al.

Základní údaje

Originální název

Single-Shot Spatially Resolved Optical Emission Spectroscopy of Plasma Species within the Spoke

Autoři

ŠLAPANSKÁ, Marta; Michael KROKER; Jaroslav HNILICA; Peter KLEIN a Petr VAŠINA

Vydání

Plasma Processing and Technology International Conference 2021, 2021

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

10305 Fluids and plasma physics

Stát vydavatele

Francie

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Označené pro přenos do RIV

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

spoke, ionisation zones, HiPIMS, OES, opti-cal emission spectroscopy, argon, titanium, spoke length distribution, UNI-spoke, excita-tion temperature, ionisation fraction

Příznaky

Mezinárodní význam

Změněno: 5. 5. 2021 13:40, Mgr. Marta Šlapanská, Ph.D.

Anotace

V originále

Using the fast cameras it has been revealed, that the plasma above the race track rearrang-es under certain conditions into localised ro-tating regions of increased light emission and intense excitation, commonly known as spokes or ionization zones. Over time, the spokes have been observed in many types of magnetron sputtering discharges, including the reactive processes. The spokes have been studied due to their potential impact on the sputtering process and, consequently, thin film deposition. It has been discovered, that spoke’s parameters, such as the mode num-ber, shape and speed of rotation, are depend-ent on practically all experimental conditions, including the magnetic field and target mate-rial in combination with working gas. This contribution presents the single-shot spa-tially resolved optical emission spectroscopy (OES) of the titanium and argon species pre-sent within the spoke captured by the Lang-muir probe and the optical fibre both placed in the deposition chamber in a non-reactive high power impulse magnetron sputtering (HiPIMS) discharge (Figure 1). The argon gas pressure in the range of 0.4 – 1.6 Pa has been set to investigate both triangular (< 0.5 Pa) and round (> 1.0 Pa) spokes. The Langmuir probe recorded the floating potential of the passing spoke in each HiPIMS pulse, there-fore the time-resolved measurement could be utilized to spatially resolve the passing spoke. It was always possible to distinguish at least two spokes on the electrical and the optical signals, therefore, determining where one spoke begins and where it ends. By pro-cessing those signals, we were able to calcu-late a spoke length distribution, and conse-quently, by creating a normalised time scale of each spoke, the unified spoke has been created. To reveal additional spoke’s inner parameters the spatially resolved excitation temperature and the ionisation fraction were obtained from the emission signal.

Návaznosti

GA19-00579S, projekt VaV

Název: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

Investor: Grantová agentura ČR, Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

LM2018097, velká výzkumná infrastruktura

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

ŠLAPANSKÁ, Marta; Michael KROKER; Jaroslav HNILICA; Peter KLEIN a Petr VAŠINA. Single-Shot Spatially Resolved Optical Emission Spectroscopy of Plasma Species within the Spoke. In Plasma Processing and Technology International Conference 2021. 2021.

@proceedings{1765856,
   author = {Šlapanská, Marta and Kroker, Michael and Hnilica, Jaroslav and Klein, Peter and Vašina, Petr},
   booktitle = {Plasma Processing and Technology International Conference 2021},
   keywords = {spoke, ionisation zones, HiPIMS, OES, opti-cal emission spectroscopy, argon, titanium, spoke length distribution, UNI-spoke, excita-tion temperature, ionisation fraction},
   language = {eng},
   title = {Single-Shot Spatially Resolved Optical Emission Spectroscopy of Plasma Species within the Spoke},
   url = {https://www.setcor.org/conferences/plasma-tech-2021},
   year = {2021}
}

TY  - CONF
ID  - 1765856
AU  - Šlapanská, Marta - Kroker, Michael - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr
PY  - 2021
TI  - Single-Shot Spatially Resolved Optical Emission Spectroscopy of Plasma Species within the Spoke
KW  - spoke, ionisation zones, HiPIMS, OES, opti-cal emission spectroscopy, argon, titanium, spoke length distribution, UNI-spoke, excita-tion temperature, ionisation fraction
UR  - https://www.setcor.org/conferences/plasma-tech-2021
N2  - Using the fast cameras it has been revealed, that the plasma above the race track rearrang-es under certain conditions into localised ro-tating regions of increased light emission and intense excitation, commonly known as spokes or ionization zones. Over time, the spokes have been observed in many types of magnetron sputtering discharges, including the reactive processes. The spokes have been studied due to their potential impact on the sputtering process and, consequently, thin film deposition. It has been discovered, that spoke’s parameters, such as the mode num-ber, shape and speed of rotation, are depend-ent on practically all experimental conditions, including the magnetic field and target mate-rial in combination with working gas. This contribution presents the single-shot spa-tially resolved optical emission spectroscopy (OES) of the titanium and argon species pre-sent within the spoke captured by the Lang-muir probe and the optical fibre both placed in the deposition chamber in a non-reactive high power impulse magnetron sputtering (HiPIMS) discharge (Figure 1). The argon gas pressure in the range of 0.4 – 1.6 Pa has been set to investigate both triangular (< 0.5 Pa) and round (> 1.0 Pa) spokes. The Langmuir probe recorded the floating potential of the passing spoke in each HiPIMS pulse, there-fore the time-resolved measurement could be utilized to spatially resolve the passing spoke. It was always possible to distinguish at least two spokes on the electrical and the optical signals, therefore, determining where one spoke begins and where it ends. By pro-cessing those signals, we were able to calcu-late a spoke length distribution, and conse-quently, by creating a normalised time scale of each spoke, the unified spoke has been created. To reveal additional spoke’s inner parameters the spatially resolved excitation temperature and the ionisation fraction were obtained from the emission signal.
ER  -

ŠLAPANSKÁ, Marta; Michael KROKER; Jaroslav HNILICA; Peter KLEIN a Petr VAŠINA. Single-Shot Spatially Resolved Optical Emission Spectroscopy of Plasma Species within the Spoke. In \textit{Plasma Processing and Technology International Conference 2021}. 2021.

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