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@article{1778222,
author = {Charvot, Jaroslav and Zazpe, Raul and Krumpolec, Richard and RodriguezandPereira, Jhonatan and Pavliňák, David and Pokorný, Daniel and Klikar, Milan and Jelínková, Veronika and Macak, Jan M. and Bureš, Filip},
article_number = {36},
doi = {http://dx.doi.org/10.1039/D0RA10239C},
keywords = {atomic layer deposition; ALD precursors; cyclic selenides; nanostructures; 2D flakes},
language = {eng},
issn = {2046-2069},
journal = {RSC Advances},
title = {Deposition of MoSe2 flakes using cyclic selenides},
url = {https://pubs.rsc.org/en/content/articlehtml/2021/ra/d0ra10239c},
volume = {11},
year = {2021}
}
TY - JOUR
ID - 1778222
AU - Charvot, Jaroslav - Zazpe, Raul - Krumpolec, Richard - Rodriguez-Pereira, Jhonatan - Pavliňák, David - Pokorný, Daniel - Klikar, Milan - Jelínková, Veronika - Macak, Jan M. - Bureš, Filip
PY - 2021
TI - Deposition of MoSe2 flakes using cyclic selenides
JF - RSC Advances
VL - 11
IS - 36
SP - 22140-22147
EP - 22140-22147
PB - Royal Society of Chemistry
SN - 20462069
KW - atomic layer deposition
KW - ALD precursors
KW - cyclic selenides
KW - nanostructures
KW - 2D flakes
UR - https://pubs.rsc.org/en/content/articlehtml/2021/ra/d0ra10239c
N2 - The currently limited portfolio of volatile organoselenium compounds used for atomic layer deposition (ALD) has been extended by designing and preparing a series of four-, five- and six-membered cyclic silylselenides. Their fundamental properties were tailored by alternating the ring size, the number of embedded Se atoms and the used peripheral alkyl chains. In contrast to former preparations based on formation of sodium or lithium selenides, the newly developed synthetic method utilizes a direct and easy reaction of elemental selenium with chlorosilanes. Novel 2,2,4,4-tetraisopropyl-1,3,2,4-diselenadisiletane, which features good trade-off between chemical/thermal stability and reactivity, has been successfully used for gas-to-solid phase reaction with MoCl5 affording MoSe2. A thorough characterization of the as-deposited 2D MoSe2 flakes revealed its out-of-plane orientation and high purity. Hence, the developed four-membered cyclic silylselenide turned out to be well-suited Se-precursor for ALD of MoSe2.
ER -
CHARVOT, Jaroslav, Raul ZAZPE, Richard KRUMPOLEC, Jhonatan RODRIGUEZ-PEREIRA, David PAVLIŇÁK, Daniel POKORNÝ, Milan KLIKAR, Veronika JELÍNKOVÁ, Jan M. MACAK a Filip BUREŠ. Deposition of MoSe2 flakes using cyclic selenides. \textit{RSC Advances}. Royal Society of Chemistry, 2021, roč.~11, č.~36, s.~22140-22147. ISSN~2046-2069. Dostupné z: https://dx.doi.org/10.1039/D0RA10239C.
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