Enhancing mechanical properties and cutting performance of
industrially sputtered AlCrN coatings by inducing cathodic arc
glow discharge

J 2021

Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge

ŽEMLIČKA, R.; Mostafa ALISHAHI; M. JÍLEK; Pavel SOUČEK; J. DANIEL et al.

Základní údaje

Originální název

Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge

Autoři

ŽEMLIČKA, R.; Mostafa ALISHAHI; M. JÍLEK; Pavel SOUČEK; J. DANIEL; J. KLUSON; H. BOLVARDI; A. LÜMKEMANN a Petr VAŠINA

Vydání

Surface and Coatings Technology, Elsevier B.V. 2021, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 4.865

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/21:00122195

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Magnetron sputtering; AlCrN coating; Ion energy; Ion-deposition flux ratio; Mechanical properties; Cutting performance

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 27. 2. 2024 13:42, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

The average ion energy per deposited atom (Ed) is defined as the product of the ion energy (Ei) and ion-deposition flux ratio (Ji/Jd) in magnetron sputtering deposition. Ed captures both the geometrical, and plasma characteristics of the deposition system and hence is regarded as a fundamental parameter for describing the energy dependency of coating structure and properties. Nevertheless, Ed is not a universal parameter since an independent variation of its components, i.e., Ei and Ji/Jd, may result in the same Ed but different coating structures and properties. While the controlling of Ji/Jd is not possible in most conventional magnetron sputtering systems, this study employed an industrially developed SCIL® (sputter coatings induced by lateral glow discharge) technology to independently control the ion flux (Ji) and investigate the dependence of structure, mechanical properties, and cutting performance of the AlCrN coatings on the Ed and its components. The results revealed that the structure of the AlCrN coatings was mainly dependent on the Ji/Jd component of Ed, where a transition from a cubic structure into a hexagonal structure took place beyond a critical level of Ji/Jd. The elastic modulus showed no Ed dependency and was only affected by coating structure. However, the hardness was strongly dependent on the Ed. Whether in Ei or Ji/Jd, an increase led to a hardness enhancement through the synergic effect of the residual stress hardening, coating densification, and grain refining mechanisms. The cutting performance of deposited tools under real working conditions was also found to be dependent on the Ed and, in particular, on Ji/Jd. Increasing Ed from ~860 to ~1170 eV/atom led to a ~55% increase in tool lifetime, reaching 90% performance of the benchmark arc-deposited coating.

Návaznosti

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

ŽEMLIČKA, R.; Mostafa ALISHAHI; M. JÍLEK; Pavel SOUČEK; J. DANIEL; J. KLUSON; H. BOLVARDI; A. LÜMKEMANN a Petr VAŠINA. Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge. Surface and Coatings Technology. Elsevier B.V., 2021, roč. 422, September, s. "127563", 9 s. ISSN 0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2021.127563.

@article{1788820,
   author = {Žemlička, R. and Alishahi, Mostafa and Jílek, M. and Souček, Pavel and Daniel, J. and Kluson, J. and Bolvardi, H. and Lümkemann, A. and Vašina, Petr},
   article_number = {September},
   doi = {https://doi.org/10.1016/j.surfcoat.2021.127563},
   keywords = {Magnetron sputtering; AlCrN coating; Ion energy; Ion-deposition flux ratio; Mechanical properties; Cutting performance},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface and Coatings Technology},
   title = {Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge},
   url = {https://doi.org/10.1016/j.surfcoat.2021.127563},
   volume = {422},
   year = {2021}
}

TY  - JOUR
ID  - 1788820
AU  - Žemlička, R. - Alishahi, Mostafa - Jílek, M. - Souček, Pavel - Daniel, J. - Kluson, J. - Bolvardi, H. - Lümkemann, A. - Vašina, Petr
PY  - 2021
TI  - Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge
JF  - Surface and Coatings Technology
VL  - 422
IS  - September
SP  - "127563"
EP  - "127563"
PB  - Elsevier B.V.
SN  - 02578972
KW  - Magnetron sputtering
KW  - AlCrN coating
KW  - Ion energy
KW  - Ion-deposition flux ratio
KW  - Mechanical properties
KW  - Cutting performance
UR  - https://doi.org/10.1016/j.surfcoat.2021.127563
N2  - The average ion energy per deposited atom (Ed) is defined as the product of the ion energy (Ei) and ion-deposition flux ratio (Ji/Jd) in magnetron sputtering deposition. Ed captures both the geometrical, and plasma characteristics of the deposition system and hence is regarded as a fundamental parameter for describing the energy dependency of coating structure and properties. Nevertheless, Ed is not a universal parameter since an independent variation of its components, i.e., Ei and Ji/Jd, may result in the same Ed but different coating structures and properties. While the controlling of Ji/Jd is not possible in most conventional magnetron sputtering systems, this study employed an industrially developed SCIL® (sputter coatings induced by lateral glow discharge) technology to independently control the ion flux (Ji) and investigate the dependence of structure, mechanical properties, and cutting performance of the AlCrN coatings on the Ed and its components. The results revealed that the structure of the AlCrN coatings was mainly dependent on the Ji/Jd component of Ed, where a transition from a cubic structure into a hexagonal structure took place beyond a critical level of Ji/Jd. The elastic modulus showed no Ed dependency and was only affected by coating structure. However, the hardness was strongly dependent on the Ed. Whether in Ei or Ji/Jd, an increase led to a hardness enhancement through the synergic effect of the residual stress hardening, coating densification, and grain refining mechanisms. The cutting performance of deposited tools under real working conditions was also found to be dependent on the Ed and, in particular, on Ji/Jd. Increasing Ed from ~860 to ~1170 eV/atom led to a ~55% increase in tool lifetime, reaching 90% performance of the benchmark arc-deposited coating.
ER  -

ŽEMLIČKA, R.; Mostafa ALISHAHI; M. JÍLEK; Pavel SOUČEK; J. DANIEL; J. KLUSON; H. BOLVARDI; A. LÜMKEMANN a Petr VAŠINA. Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge. \textit{Surface and Coatings Technology}. Elsevier B.V., 2021, roč.~422, September, s.~''127563'', 9 s. ISSN~0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2021.127563.

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