Single-shot spatial-resolved optical emission spectroscopy of
argon and titanium species within the spoke

J 2022

Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

ŠLAPANSKÁ, Marta; Michael KROKER; Jaroslav HNILICA; Peter KLEIN; Petr VAŠINA et al.

Základní údaje

Originální název

Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

Autoři

ŠLAPANSKÁ, Marta; Michael KROKER; Jaroslav HNILICA; Peter KLEIN a Petr VAŠINA

Vydání

Journal of Physics D: Applied Physics, IOP Publishing, 2022, 0022-3727

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.400

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/22:00119345

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

HiPIMS; spokes; excitation temperature; floating potential; optical emission spectroscopy; probe; magnetron sputtering

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 13. 3. 2023 15:23, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

The rotating plasma patterns, also known as ionisation zones or spokes, observed, among other discharges, in high power impulse magnetron sputtering discharge (HiPIMS) require non-invasive diagnostics favourable for a precise characterisation of their properties. In this contribution, the single-shot spatial-resolved optical emission spectroscopy of the spoke was conducted in non-reactive HiPIMS discharge using a titanium target. Investigated working pressures cover the conditions with the presence of localised, well-defined spokes. A fast photodiode and a cylindrical Langmuir probe were utilised to capture and determine the passing spoke position. These signals were synchronised with the acquisition of the optical emission spectrum by the intensified charge-coupled device detector. A large amount of single-shot data enabled the statistical analysis of the spoke. The optical emissions of argon atoms and ions and titanium atoms and ions were investigated in the passing spoke. It was found that the intensities of the spectral lines of the Ar and Ti species have the characteristic evolution for all studied spectral lines of this specific species within the spoke. The intensity evolutions are independent of the applied pressure. The evolution of the excitation temperatures determined by the Boltzmann plot method using the Ar II and Ti I and Ti II spectral lines remains constant within the spoke in the margin of standard error for all investigated pressures.

Návaznosti

GA19-00579S, projekt VaV

Název: Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

Investor: Grantová agentura ČR, Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev

LM2018097, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

ŠLAPANSKÁ, Marta; Michael KROKER; Jaroslav HNILICA; Peter KLEIN a Petr VAŠINA. Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke. Journal of Physics D: Applied Physics. IOP Publishing, 2022, roč. 55, č. 3, s. 035205-35217. ISSN 0022-3727. Dostupné z: https://doi.org/10.1088/1361-6463/ac2cae.

@article{1803571,
   author = {Šlapanská, Marta and Kroker, Michael and Hnilica, Jaroslav and Klein, Peter and Vašina, Petr},
   article_number = {3},
   doi = {https://doi.org/10.1088/1361-6463/ac2cae},
   keywords = {HiPIMS; spokes; excitation temperature; floating potential; optical emission spectroscopy; probe; magnetron sputtering},
   language = {eng},
   issn = {0022-3727},
   journal = {Journal of Physics D: Applied Physics},
   title = {Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke},
   url = {https://iopscience.iop.org/article/10.1088/1361-6463/ac2cae/meta},
   volume = {55},
   year = {2022}
}

TY  - JOUR
ID  - 1803571
AU  - Šlapanská, Marta - Kroker, Michael - Hnilica, Jaroslav - Klein, Peter - Vašina, Petr
PY  - 2022
TI  - Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke
JF  - Journal of Physics D: Applied Physics
VL  - 55
IS  - 3
SP  - 035205
EP  - 035205
PB  - IOP Publishing
SN  - 00223727
KW  - HiPIMS
KW  - spokes
KW  - excitation temperature
KW  - floating potential
KW  - optical emission spectroscopy
KW  - probe
KW  - magnetron sputtering
UR  - https://iopscience.iop.org/article/10.1088/1361-6463/ac2cae/meta
N2  - The rotating plasma patterns, also known as ionisation zones or spokes, observed, among other discharges, in high power impulse magnetron sputtering discharge (HiPIMS) require non-invasive diagnostics favourable for a precise characterisation of their properties. In this contribution, the single-shot spatial-resolved optical emission spectroscopy of the spoke was conducted in non-reactive HiPIMS discharge using a titanium target. Investigated working pressures cover the conditions with the presence of localised, well-defined spokes. A fast photodiode and a cylindrical Langmuir probe were utilised to capture and determine the passing spoke position. These signals were synchronised with the acquisition of the optical emission spectrum by the intensified charge-coupled device detector. A large amount of single-shot data enabled the statistical analysis of the spoke. The optical emissions of argon atoms and ions and titanium atoms and ions were investigated in the passing spoke. It was found that the intensities of the spectral lines of the Ar and Ti species have the characteristic evolution for all studied spectral lines of this specific species within the spoke. The intensity evolutions are independent of the applied pressure. The evolution of the excitation temperatures determined by the Boltzmann plot method using the Ar II and Ti I and Ti II spectral lines remains constant within the spoke in the margin of standard error for all investigated pressures.
ER  -

ŠLAPANSKÁ, Marta; Michael KROKER; Jaroslav HNILICA; Peter KLEIN a Petr VAŠINA. Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke. \textit{Journal of Physics D: Applied Physics}. IOP Publishing, 2022, roč.~55, č.~3, s.~035205-35217. ISSN~0022-3727. Dostupné z: https://doi.org/10.1088/1361-6463/ac2cae.

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