Characterization of randomly rough surfaces using
angle-resolved scattering of light and atomic force microscopy

J 2021

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

ŠUSTEK, Štěpán; Jiří VOHÁNKA; Ivan OHLÍDAL; Miloslav OHLÍDAL; Václav ŠULC et al.

Základní údaje

Originální název

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Autoři

ŠUSTEK, Štěpán; Jiří VOHÁNKA; Ivan OHLÍDAL; Miloslav OHLÍDAL; Václav ŠULC; Petr KLAPETEK a Nupinder Jeet KAUR

Vydání

Journal of Optics, Bristol, IOP Publishing, 2021, 2040-8978

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 2.077

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/21:00118706

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

angle-resolved scattering; randomly rough surfaces; scalar diffraction theory; Rayleigh-Rice perturbation theory; atomic force microscopy

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 27. 2. 2024 14:05, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh-Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.

Návaznosti

FV40328, projekt VaV

Název: Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

Investor: Ministerstvo průmyslu a obchodu ČR, Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

ŠUSTEK, Štěpán; Jiří VOHÁNKA; Ivan OHLÍDAL; Miloslav OHLÍDAL; Václav ŠULC; Petr KLAPETEK a Nupinder Jeet KAUR. Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy. Journal of Optics. Bristol: IOP Publishing, 2021, roč. 23, č. 10, s. 105602-105615. ISSN 2040-8978. Dostupné z: https://doi.org/10.1088/2040-8986/ac1f35.

@article{1821387,
   author = {Šustek, Štěpán and Vohánka, Jiří and Ohlídal, Ivan and Ohlídal, Miloslav and Šulc, Václav and Klapetek, Petr and Kaur, Nupinder Jeet},
   article_location = {Bristol},
   article_number = {10},
   doi = {https://doi.org/10.1088/2040-8986/ac1f35},
   keywords = {angle-resolved scattering; randomly rough surfaces; scalar diffraction theory; Rayleigh-Rice perturbation theory; atomic force microscopy},
   language = {eng},
   issn = {2040-8978},
   journal = {Journal of Optics},
   title = {Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy},
   url = {https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35/},
   volume = {23},
   year = {2021}
}

TY  - JOUR
ID  - 1821387
AU  - Šustek, Štěpán - Vohánka, Jiří - Ohlídal, Ivan - Ohlídal, Miloslav - Šulc, Václav - Klapetek, Petr - Kaur, Nupinder Jeet
PY  - 2021
TI  - Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy
JF  - Journal of Optics
VL  - 23
IS  - 10
SP  - 105602
EP  - 105602
PB  - IOP Publishing
SN  - 20408978
KW  - angle-resolved scattering
KW  - randomly rough surfaces
KW  - scalar diffraction theory
KW  - Rayleigh-Rice perturbation theory
KW  - atomic force microscopy
UR  - https://iopscience.iop.org/article/10.1088/2040-8986/ac1f35/
N2  - The roughness of four samples of silicon single-crystal surfaces roughened by anodic oxidation is studied using atomic force microscopy (AFM) and angle-resolved scattering of light. The power spectral density functions (PSDFs) are determined on the basis of the measured values of the intensity of the scattered light. This is done on the basis of three models, which establish relation between the intensity of the light scattered in the given direction and the values of the PSDF at a certain spatial frequency. Two of the models are based on the scalar diffraction theory (SDT), while the third is based on the Rayleigh-Rice perturbation theory. The formulae corresponding to the SDT are derived in the theoretical part of the paper. The condition for the Fraunhofer diffraction is not satisfied if the values of the wavelength, distance to the detector and the dimensions of the illuminated spot on the sample used in the experiment are considered. However, it is shown that if the calculation of the intensity of the scattered light is performed in a certain way, then the validity of the expansion only up to the linear terms in the phase terms, i.e. in the same way as in the Fraunhofer diffraction, is not limited by the dimensions of the light spot but by the autocorrelation length of the randomly rough surface. The results obtained by the optical methods are compared with those obtained by AFM. It is shown that there is a good agreement between these results.
ER  -

ŠUSTEK, Štěpán; Jiří VOHÁNKA; Ivan OHLÍDAL; Miloslav OHLÍDAL; Václav ŠULC; Petr KLAPETEK a Nupinder Jeet KAUR. Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy. \textit{Journal of Optics}. Bristol: IOP Publishing, 2021, roč.~23, č.~10, s.~105602-105615. ISSN~2040-8978. Dostupné z: https://doi.org/10.1088/2040-8986/ac1f35.

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