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@proceedings{1824168,
author = {Klein, Peter and Hnilica, Jaroslav and Fekete, Matej and Šlapanská, Marta and Vašina, Petr},
booktitle = {5th German-Czech Workshop on Nanomaterials},
keywords = {Spokes, magnetron, HiPIMS},
title = {Investigation of spokes in reactive HiPIMS using Ar/N2 atmosphere},
year = {2021}
}
TY - CONF
ID - 1824168
AU - Klein, Peter - Hnilica, Jaroslav - Fekete, Matej - Šlapanská, Marta - Vašina, Petr
PY - 2021
TI - Investigation of spokes in reactive HiPIMS using Ar/N2 atmosphere
KW - Spokes, magnetron, HiPIMS
ER -
KLEIN, Peter, Jaroslav HNILICA, Matej FEKETE, Marta ŠLAPANSKÁ a Petr VAŠINA. Investigation of spokes in reactive HiPIMS using Ar/N2 atmosphere. In \textit{5th German-Czech Workshop on Nanomaterials}. 2021.
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