Optical characterization of inhomogeneous thin films with
randomly rough boundaries

J 2022

Optical characterization of inhomogeneous thin films with randomly rough boundaries

VOHÁNKA, Jiří; Ivan OHLÍDAL; Vilma BURŠÍKOVÁ; Petr KLAPETEK; Nupinder Jeet KAUR et al.

Základní údaje

Originální název

Optical characterization of inhomogeneous thin films with randomly rough boundaries

Autoři

VOHÁNKA, Jiří; Ivan OHLÍDAL; Vilma BURŠÍKOVÁ; Petr KLAPETEK a Nupinder Jeet KAUR

Vydání

Optics Express, Washington, D.C. Optica Publishing Group, 2022, 1094-4087

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

20506 Coating and films

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.800

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/22:00119633

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

polymer; thin film; single-crystal substrate; silicon

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 27. 2. 2024 13:34, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface.

Návaznosti

FV40328, projekt VaV

Název: Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

Investor: Ministerstvo průmyslu a obchodu ČR, Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

GA19-15240S, projekt VaV

Název: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Grantová agentura ČR, Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

VOHÁNKA, Jiří; Ivan OHLÍDAL; Vilma BURŠÍKOVÁ; Petr KLAPETEK a Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries. Optics Express. Washington, D.C.: Optica Publishing Group, 2022, roč. 30, č. 2, s. 2033-2047. ISSN 1094-4087. Dostupné z: https://doi.org/10.1364/OE.447146.

@article{1830997,
   author = {Vohánka, Jiří and Ohlídal, Ivan and Buršíková, Vilma and Klapetek, Petr and Kaur, Nupinder Jeet},
   article_location = {Washington, D.C.},
   article_number = {2},
   doi = {https://doi.org/10.1364/OE.447146},
   keywords = {polymer; thin film; single-crystal substrate; silicon},
   language = {eng},
   issn = {1094-4087},
   journal = {Optics Express},
   title = {Optical characterization of inhomogeneous thin films with randomly rough boundaries},
   url = {https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886},
   volume = {30},
   year = {2022}
}

TY  - JOUR
ID  - 1830997
AU  - Vohánka, Jiří - Ohlídal, Ivan - Buršíková, Vilma - Klapetek, Petr - Kaur, Nupinder Jeet
PY  - 2022
TI  - Optical characterization of inhomogeneous thin films with randomly rough boundaries
JF  - Optics Express
VL  - 30
IS  - 2
SP  - 2033-2047
EP  - 2033-2047
PB  - Optica Publishing Group
SN  - 10944087
KW  - polymer
KW  - thin film
KW  - single-crystal substrate
KW  - silicon
UR  - https://opg.optica.org/oe/fulltext.cfm?uri=oe-30-2-2033&id=467886
N2  - An inhomogeneous polymer-like thin film was deposited by the plasma enhanced chemical vapor deposition onto silicon single-crystal substrate whose surface was roughened by anodic oxidation. The inhomogeneous thin film with randomly rough boundaries was created as a result. This sample was studied using the variable-angle spectroscopic ellipsometry and spectroscopic reflectometry. The structural model including the inhomogeneous thin film, transition layer, and identically rough boundaries was used to process the experimental data. The scalar diffraction theory was used to describe the influence of roughness. The influence of the scattered light registered by the spectrophotometer due to its finite acceptance angle was also taken into account. The thicknesses and optical constants of the inhomogeneous thin film and the transition layer were determined in the optical characterization together with the roughness parameters. The determined rms value of the heights of roughness was found to be in good agreement with values obtained using AFM. The results of the optical characterization of the studied inhomogeneous thin film with rough boundaries were also verified by comparing them with the results of the optical characterization of the inhomogeneous thin film prepared using the same deposition conditions but onto the substrate with a smooth surface.
ER  -

VOHÁNKA, Jiří; Ivan OHLÍDAL; Vilma BURŠÍKOVÁ; Petr KLAPETEK a Nupinder Jeet KAUR. Optical characterization of inhomogeneous thin films with randomly rough boundaries. \textit{Optics Express}. Washington, D.C.: Optica Publishing Group, 2022, roč.~30, č.~2, s.~2033-2047. ISSN~1094-4087. Dostupné z: https://doi.org/10.1364/OE.447146.

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