Synthesis and characterization of Ta–B–C coatings prepared by
DCMS and HiPIMS co-sputtering

J 2022

Synthesis and characterization of Ta–B–C coatings prepared by DCMS and HiPIMS co-sputtering

POLAČEK, Maroš; Pavel SOUČEK; Mostafa ALISHAHI; N. KOUTNÁ; Peter KLEIN et al.

Základní údaje

Originální název

Synthesis and characterization of Ta–B–C coatings prepared by DCMS and HiPIMS co-sputtering

Autoři

POLAČEK, Maroš; Pavel SOUČEK; Mostafa ALISHAHI; N. KOUTNÁ; Peter KLEIN; Lukáš ZÁBRANSKÝ; Zsolt CZIGÁNY; K. BALÁZSI a Petr VAŠINA

Vydání

Vacuum, Elsevier, 2022, 0042-207X

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 4.000

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/22:00125392

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Magnetron sputtering; HiPIMS; Ta–B–C; Microstructure; Mechanical properties

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 22. 2. 2024 10:16, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

This study reports on the deposition and properties of Ta–B–C coatings by the co-sputtering of tantalum, boron carbide, and graphite targets using High Power Impulse Magnetron Sputtering (HiPIMS). It was possible to affect the microstructure of the deposited coatings by altering the deposition temperature or by the application of RF induced self-bias on the substrates without changing their chemical composition. The only identified crystalline phase from the Ta–B–C system present was TaC. The boron content in the coatings shows that the TaC crystallite size can be changed by a factor of 10 by changing the power to the boron carbide target. Mechanical properties of the coatings measured directly after the synthesis yield hardness higher than 40 GPa. After the relaxation of internal stress in the coatings (after one year) and changes in the structure, the hardness of all coatings was close to 36 GPa. According to ab initio calculations, the B incorporation in the fcc lattice of TaC in combination with C vacancies lead to lower (higher) shear-to-bulk modulus ratio (Poisson’s ratio), providing a good basis for improved ductility. All in all, Ta–B–C system shows a good potential as a novel hard protective coating.

Návaznosti

GA19-03899S, projekt VaV

Název: Nanolaminátní vrstvy připravené magnetronovým naprašováním - perspektivní tvrdý materiál se zvýšenou lomovou houževnatostí

Investor: Grantová agentura ČR, Nanolaminátní vrstvy připravené magnetronovým naprašováním - perspektivní tvrdý materiál se zvýšenou lomovou houževnatostí

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

POLAČEK, Maroš; Pavel SOUČEK; Mostafa ALISHAHI; N. KOUTNÁ; Peter KLEIN; Lukáš ZÁBRANSKÝ; Zsolt CZIGÁNY; K. BALÁZSI a Petr VAŠINA. Synthesis and characterization of Ta–B–C coatings prepared by DCMS and HiPIMS co-sputtering. Vacuum. Elsevier, 2022, roč. 199, May, s. 1-9. ISSN 0042-207X. Dostupné z: https://doi.org/10.1016/j.vacuum.2022.110937.

@article{1834745,
   author = {Polaček, Maroš and Souček, Pavel and Alishahi, Mostafa and Koutná, N. and Klein, Peter and Zábranský, Lukáš and Czigány, Zsolt and Balázsi, K. and Vašina, Petr},
   article_number = {May},
   doi = {https://doi.org/10.1016/j.vacuum.2022.110937},
   keywords = {Magnetron sputtering; HiPIMS; Ta–B–C; Microstructure; Mechanical properties},
   language = {eng},
   issn = {0042-207X},
   journal = {Vacuum},
   title = {Synthesis and characterization of Ta–B–C coatings prepared by DCMS and HiPIMS co-sputtering},
   url = {https://doi.org/10.1016/j.vacuum.2022.110937},
   volume = {199},
   year = {2022}
}

TY  - JOUR
ID  - 1834745
AU  - Polaček, Maroš - Souček, Pavel - Alishahi, Mostafa - Koutná, N. - Klein, Peter - Zábranský, Lukáš - Czigány, Zsolt - Balázsi, K. - Vašina, Petr
PY  - 2022
TI  - Synthesis and characterization of Ta–B–C coatings prepared by DCMS and HiPIMS co-sputtering
JF  - Vacuum
VL  - 199
IS  - May
SP  - 1-9
EP  - 1-9
PB  - Elsevier
SN  - 0042207X
KW  - Magnetron sputtering
KW  - HiPIMS
KW  - Ta–B–C
KW  - Microstructure
KW  - Mechanical properties
UR  - https://doi.org/10.1016/j.vacuum.2022.110937
N2  - This study reports on the deposition and properties of Ta–B–C coatings by the co-sputtering of tantalum, boron carbide, and graphite targets using High Power Impulse Magnetron Sputtering (HiPIMS). It was possible to affect the microstructure of the deposited coatings by altering the deposition temperature or by the application of RF induced self-bias on the substrates without changing their chemical composition. The only identified crystalline phase from the Ta–B–C system present was TaC. The boron content in the coatings shows that the TaC crystallite size can be changed by a factor of 10 by changing the power to the boron carbide target. Mechanical properties of the coatings measured directly after the synthesis yield hardness higher than 40 GPa. After the relaxation of internal stress in the coatings (after one year) and changes in the structure, the hardness of all coatings was close to 36 GPa. According to ab initio calculations, the B incorporation in the fcc lattice of TaC in combination with C vacancies lead to lower (higher) shear-to-bulk modulus ratio (Poisson’s ratio), providing a good basis for improved ductility. All in all, Ta–B–C system shows a good potential as a novel hard protective coating.
ER  -

POLAČEK, Maroš; Pavel SOUČEK; Mostafa ALISHAHI; N. KOUTNÁ; Peter KLEIN; Lukáš ZÁBRANSKÝ; Zsolt CZIGÁNY; K. BALÁZSI a Petr VAŠINA. Synthesis and characterization of Ta–B–C coatings prepared by DCMS and HiPIMS co-sputtering. \textit{Vacuum}. Elsevier, 2022, roč.~199, May, s.~1-9. ISSN~0042-207X. Dostupné z: https://doi.org/10.1016/j.vacuum.2022.110937.

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