Spatially resolved study of spokes in reactive HiPIMS discharge

J 2022

Spatially resolved study of spokes in reactive HiPIMS discharge

ŠLAPANSKÁ, Marta; Michael KROKER; Peter KLEIN; Jaroslav HNILICA; Petr VAŠINA et al.

Základní údaje

Originální název

Spatially resolved study of spokes in reactive HiPIMS discharge

Autoři

ŠLAPANSKÁ, Marta; Michael KROKER; Peter KLEIN; Jaroslav HNILICA a Petr VAŠINA

Vydání

Plasma Sources Science and Technology, IOP Publishing, 2022, 0963-0252

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.800

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/22:00125719

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

spokes; ionisation zones; OES; Langmuir probe; titanium target; reactive HiPIMS; nitrogen

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 9. 1. 2023 10:41, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

Understanding mechanisms behind the formation and propagation of ionisation zones, so-called spokes, have been highly important since the first observations in HiPIMS discharges. To this day, however, a complete description is still lacking. This contribution gives an insight into the spokes in reactive Ar-N2 atmosphere using titanium target. The aim of this study is to describe not only global parameters of spokes such as their shape, length and propagation velocity but also provide a description of parameters evolving over the spoke, such as floating potential and spectral emission. The measurements of the latter clearly showed which species emission is most prominent and how it changes with transition from non-reactive argon discharge towards the discharge driven in a pure nitrogen atmosphere. Implications on the gas dynamics and discharge transitions are discussed.

Návaznosti

LM2018097, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav (Akronym: CEPLANT)

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

ŠLAPANSKÁ, Marta; Michael KROKER; Peter KLEIN; Jaroslav HNILICA a Petr VAŠINA. Spatially resolved study of spokes in reactive HiPIMS discharge. Plasma Sources Science and Technology. IOP Publishing, 2022, roč. 31, č. 5, s. 1-10. ISSN 0963-0252. Dostupné z: https://doi.org/10.1088/1361-6595/ac6a0c.

@article{1849479,
   author = {Šlapanská, Marta and Kroker, Michael and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
   article_number = {5},
   doi = {https://doi.org/10.1088/1361-6595/ac6a0c},
   keywords = {spokes; ionisation zones; OES; Langmuir probe; titanium target; reactive HiPIMS; nitrogen},
   language = {eng},
   issn = {0963-0252},
   journal = {Plasma Sources Science and Technology},
   title = {Spatially resolved study of spokes in reactive HiPIMS discharge},
   url = {https://iopscience.iop.org/article/10.1088/1361-6595/ac6a0c},
   volume = {31},
   year = {2022}
}

TY  - JOUR
ID  - 1849479
AU  - Šlapanská, Marta - Kroker, Michael - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY  - 2022
TI  - Spatially resolved study of spokes in reactive HiPIMS discharge
JF  - Plasma Sources Science and Technology
VL  - 31
IS  - 5
SP  - 1-10
EP  - 1-10
PB  - IOP Publishing
SN  - 09630252
KW  - spokes
KW  - ionisation zones
KW  - OES
KW  - Langmuir probe
KW  - titanium target
KW  - reactive HiPIMS
KW  - nitrogen
UR  - https://iopscience.iop.org/article/10.1088/1361-6595/ac6a0c
N2  - Understanding mechanisms behind the formation and propagation of ionisation zones, so-called spokes, have been highly important since the first observations in HiPIMS discharges. To this day, however, a complete description is still lacking. This contribution gives an insight into the spokes in reactive Ar-N2 atmosphere using titanium target. The aim of this study is to describe not only global parameters of spokes such as their shape, length and propagation velocity but also provide a description of parameters evolving over the spoke, such as floating potential and spectral emission. The measurements of the latter clearly showed which species emission is most prominent and how it changes with transition from non-reactive argon discharge towards the discharge driven in a pure nitrogen atmosphere. Implications on the gas dynamics and discharge transitions are discussed.
ER  -

ŠLAPANSKÁ, Marta; Michael KROKER; Peter KLEIN; Jaroslav HNILICA a Petr VAŠINA. Spatially resolved study of spokes in reactive HiPIMS discharge. \textit{Plasma Sources Science and Technology}. IOP Publishing, 2022, roč.~31, č.~5, s.~1-10. ISSN~0963-0252. Dostupné z: https://doi.org/10.1088/1361-6595/ac6a0c.

Přehled o publikaci