Langmuir probe without RF compensation

J 2022

Langmuir probe without RF compensation

DVOŘÁK, Pavel, Juraj PÁLENIK, Maroš TKÁČIK a Zdeněk POSPÍŠIL

Základní údaje

Originální název

Langmuir probe without RF compensation

Autoři

DVOŘÁK, Pavel (203 Česká republika, garant, domácí), Juraj PÁLENIK (703 Slovensko, domácí), Maroš TKÁČIK (703 Slovensko, domácí) a Zdeněk POSPÍŠIL (203 Česká republika, domácí)

Vydání

Plasma Sources Science and Technology, IOP Publishing Ltd, 2022, 0963-0252

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.800

Kód RIV

RIV/00216224:14310/22:00126312

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1088/1361-6595/ac83eb

UT WoS

000841586300001

EID Scopus

2-s2.0-85136714911

Klíčová slova česky

plazma; Langmuirova sonda; nekompenzovaná sonda; potenciál plazmatu; CCP

Klíčová slova anglicky

plasma; Langmuir probe; uncompensated probe; plasma potential; CCP

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 22. 2. 2024 10:18, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

Langmuir probes with RF compensation are used for measurements of electron concentration, electron temperature and the DC value of plasma potential in RF discharges. In order to obtain all the RF components of plasma potential, simple probes without RF compensation are used. However, it has been believed that these uncompensated probes can not be used for determination of the DC value of plasma potential and of electron concentration and temperature, since their VA characteristics is distorted by the RF current. Consequently, the evaluation of data measured with uncompensated probes was not possible without additional measurement with a RF compensated Langmuir probe. This contribution analyzes the possibility to use uncompensated probes not only for measurement of RF components of plasma potential, but also for measurement of the DC component of plasma potential, electron concentration and electron temperature.

Návaznosti

GA19-15240S, projekt VaV

Název: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Grantová agentura ČR, Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

DVOŘÁK, Pavel, Juraj PÁLENIK, Maroš TKÁČIK a Zdeněk POSPÍŠIL. Langmuir probe without RF compensation. Plasma Sources Science and Technology. IOP Publishing Ltd, 2022, roč. 31, č. 8, s. 1-5. ISSN 0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/ac83eb.

@article{1876018,
   author = {Dvořák, Pavel and Pálenik, Juraj and Tkáčik, Maroš and Pospíšil, Zdeněk},
   article_number = {8},
   doi = {http://dx.doi.org/10.1088/1361-6595/ac83eb},
   keywords = {plasma; Langmuir probe; uncompensated probe; plasma potential; CCP},
   language = {eng},
   issn = {0963-0252},
   journal = {Plasma Sources Science and Technology},
   title = {Langmuir probe without RF compensation},
   url = {https://iopscience.iop.org/article/10.1088/1361-6595/ac83eb},
   volume = {31},
   year = {2022}
}

TY  - JOUR
ID  - 1876018
AU  - Dvořák, Pavel - Pálenik, Juraj - Tkáčik, Maroš - Pospíšil, Zdeněk
PY  - 2022
TI  - Langmuir probe without RF compensation
JF  - Plasma Sources Science and Technology
VL  - 31
IS  - 8
SP  - 1-5
EP  - 1-5
PB  - IOP Publishing Ltd
SN  - 09630252
KW  - plasma
KW  - Langmuir probe
KW  - uncompensated probe
KW  - plasma potential
KW  - CCP
UR  - https://iopscience.iop.org/article/10.1088/1361-6595/ac83eb
N2  - Langmuir probes with RF compensation are used for measurements of electron concentration, electron temperature and the DC value of plasma potential in RF discharges. In order to obtain all the RF components of plasma potential, simple probes without RF compensation are used. However, it has been believed that these uncompensated probes can not be used for determination of the DC value of plasma potential and of electron concentration and temperature, since their VA characteristics is distorted by the RF current. Consequently, the evaluation of data measured with uncompensated probes was not possible without additional measurement with a RF compensated Langmuir probe. This contribution analyzes the possibility to use uncompensated probes not only for measurement of RF components of plasma potential, but also for measurement of the DC component of plasma potential, electron concentration and electron temperature.
ER  -

DVOŘÁK, Pavel, Juraj PÁLENIK, Maroš TKÁČIK a Zdeněk POSPÍŠIL. Langmuir probe without RF compensation. \textit{Plasma Sources Science and Technology}. IOP Publishing Ltd, 2022, roč.~31, č.~8, s.~1-5. ISSN~0963-0252. Dostupné z: https://dx.doi.org/10.1088/1361-6595/ac83eb.

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