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@inproceedings{197276, author = {Zajíčková, Lenka and Krzyžánková, Michaela and Janča, Jan}, address = {Prague (Czech Rep.)}, booktitle = {Proceedings of 17th Symposium on Plasma Physics and Technology}, language = {eng}, location = {Prague (Czech Rep.)}, isbn = {80-010-1344-8}, pages = {293-295}, publisher = {ČVUT Praha}, title = {Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures}, year = {1995} }
TY - JOUR ID - 197276 AU - Zajíčková, Lenka - Krzyžánková, Michaela - Janča, Jan PY - 1995 TI - Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures PB - ČVUT Praha CY - Prague (Czech Rep.) SN - 8001013448 N2 - Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures ER -
ZAJÍČKOVÁ, Lenka, Michaela KRZYŽÁNKOVÁ a Jan JANČA. Effects of DC bias on the PECVD deposition of thin films from octamethylcyclotetrasiloxane (OMTS) and oxygen mixtures. In \textit{Proceedings of 17th Symposium on Plasma Physics and Technology}. Prague (Czech Rep.): ČVUT Praha, 1995, s.~293-295. ISBN~80-010-1344-8.
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