| KUČÍRKOVÁ, Assja, Karel NAVRÁTIL a J. ZEMEK. Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films. Thin Solid Films. UK Oxford: Elsevier science, 1998, (323)1998, -, s. 53-58. ISSN 0040-6090. |
Další formáty:
BibTeX
LaTeX
RIS
@article{200299,
author = {Kučírková, Assja and Navrátil, Karel and Zemek, J.},
article_location = {UK Oxford},
article_number = {-},
keywords = {thin films},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films},
volume = {(323)1998},
year = {1998}
}
TY - JOUR
ID - 200299
AU - Kučírková, Assja - Navrátil, Karel - Zemek, J.
PY - 1998
TI - Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films
JF - Thin Solid Films
VL - (323)1998
IS - -
SP - 53
EP - 53
PB - Elsevier science
SN - 00406090
KW - thin films
ER -
KUČÍRKOVÁ, Assja, Karel NAVRÁTIL a J. ZEMEK. Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films. \textit{Thin Solid Films}. UK Oxford: Elsevier science, 1998, (323)1998, -, s.~53-58. ISSN~0040-6090.
|
