Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films

KUČÍRKOVÁ, Assja, Karel NAVRÁTIL and J. ZEMEK. Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films. Thin Solid Films. UK Oxford: Elsevier science, 1998, (323)1998, -, p. 53-58. ISSN 0040-6090.

Basic information

Original name

Depth inhomogeneity of deposited thin films: application to semi-insulating polycrystalline silicon films

Authors

KUČÍRKOVÁ, Assja, Karel NAVRÁTIL and J. ZEMEK

Edition

Thin Solid Films, UK Oxford, Elsevier science, 1998, 0040-6090

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Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10302 Condensed matter physics

Country of publisher

United Kingdom of Great Britain and Northern Ireland

Confidentiality degree

není předmětem státního či obchodního tajemství

Impact factor

Impact factor: 1.019

Organization unit

Faculty of Science

UT WoS

000074746000009

Keywords in English

thin films

Tags

thin films