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@article{200399, author = {Ohlídal, Ivan and Franta, Daniel}, article_location = {Bratislava}, article_number = {4}, language = {eng}, issn = {0323-0465}, journal = {Acta Physica Slovaca}, title = {Ellipsometry of thin films}, url = {http://hydra.physics.muni.cz/~franta/bib/APS48_459.html}, volume = {48}, year = {1998} }
TY - JOUR ID - 200399 AU - Ohlídal, Ivan - Franta, Daniel PY - 1998 TI - Ellipsometry of thin films JF - Acta Physica Slovaca VL - 48 IS - 4 SP - 459 EP - 459 PB - Institute of Physics, SAS SN - 03230465 UR - http://hydra.physics.muni.cz/~franta/bib/APS48_459.html N2 - In this paper a brief review of ellipsometric methods is presented for analyzing thin films. Examples of using these methods will be introduced as well. By means of results obtained using the ellipsometric methods introduced their practical meaning will be illustrated. It will be shown that the ellipsometric method can be tilized for analyzing single layers and multilayer systems in it successful way. ER -
OHLÍDAL, Ivan a Daniel FRANTA. Ellipsometry of thin films. \textit{Acta Physica Slovaca}. Bratislava: Institute of Physics, SAS, 1998, roč.~48, č.~4, s.~459-468. ISSN~0323-0465.
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