1999
High-resolution x-ray diffraction on self-organized step bunches of Si1-xGex grown on (113)-oriented Si
STANGL, J.; Václav HOLÝ; A.A. DARHUBER; Petr MIKULÍK; G. BAUER et al.Základní údaje
Originální název
High-resolution x-ray diffraction on self-organized step bunches of Si1-xGex grown on (113)-oriented Si
Autoři
STANGL, J.; Václav HOLÝ; A.A. DARHUBER; Petr MIKULÍK; G. BAUER; J. ZHU; K. BRUNNER a G. ABSTREITER
Vydání
J. Phys. D: Appl. Phys. Velká Britanie, IOP Publishing LTd, 1999, 0022-3727
Další údaje
Jazyk
angličtina
Typ výsledku
Článek v odborném periodiku
Obor
10302 Condensed matter physics
Stát vydavatele
Velká Británie a Severní Irsko
Utajení
není předmětem státního či obchodního tajemství
Impakt faktor
Impact factor: 1.188
Označené pro přenos do RIV
Ano
Kód RIV
RIV/00216224:14310/99:00000994
Organizační jednotka
Přírodovědecká fakulta
Příznaky
Mezinárodní význam, Recenzováno
Změněno: 12. 2. 2007 18:58, doc. RNDr. Petr Mikulík, Ph.D.
V originále
We present investigations of a highly regular terraced surface and interface structure of Si/SiGe multilayers on Si(113) by x-ray diffraction, x-ray reflectivity and atomic force microscopy. A regular array of step bunches with lateral periods of several hundred nanometres is formed during the growth of the Si/Si1-xGex multilayers. X-ray diffraction patterns are simulated using the elastic Green function approach for the evaluation of the strain fields associated with the step edges, taking into account the relaxation towards the free surface. In addition to the terrace structure, a surface waviness on the micrometer length scale is present, leading to a modulation of the terrace widths.
Česky
We present investigations of a highly regular terraced surface and interface structure of Si/SiGe multilayers on Si(113) by x-ray diffraction, x-ray reflectivity and atomic force microscopy. A regular array of step bunches with lateral periods of several hundred nanometres is formed during the growth of the Si/Si1-xGex multilayers. X-ray diffraction patterns are simulated using the elastic Green function approach for the evaluation of the strain fields associated with the step edges, taking into account the relaxation towards the free surface. In addition to the terrace structure, a surface waviness on the micrometer length scale is present, leading to a modulation of the terrace widths.
Návaznosti
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