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@inproceedings{205651,
author = {Buršíková, Vilma and Zajíčková, Lenka and Janča, Jan},
address = {Praha},
booktitle = {ICPP},
edition = {1.},
keywords = {mechanical propertires; thin Films; PECVD},
language = {eng},
location = {Praha},
pages = {918-921},
publisher = {Ústav fyziky plazmatu ČAV, Praha},
title = {Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings},
year = {1998}
}
TY - JOUR
ID - 205651
AU - Buršíková, Vilma - Zajíčková, Lenka - Janča, Jan
PY - 1998
TI - Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings
PB - Ústav fyziky plazmatu ČAV, Praha
CY - Praha
KW - mechanical propertires
KW - thin Films
KW - PECVD
N2 - Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings
ER -
BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ a Jan JANČA. Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings. In \textit{ICPP}. 1. vyd. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, s.~918-921.
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