ČEŠKA, Zbyněk, Jan JANČA and M. DVOŘÁK. ECR plasma deposition of thin films. In WDS 98. 1st ed. Praha: Karlova univerzita, Praha, 1998, p. 327-331. ISBN 80-85863-29-4.
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Basic information
Original name ECR plasma deposition of thin films
Authors ČEŠKA, Zbyněk, Jan JANČA and M. DVOŘÁK.
Edition 1. vyd. Praha, WDS 98, p. 327-331, 1998.
Publisher Karlova univerzita, Praha
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
ISBN 80-85863-29-4
Keywords in English ECR plasma; thin films
Tags ECR plasma, thin films
Changed by Changed by: prof. RNDr. Jan Janča, DrSc., učo 29. Changed: 17/6/1999 14:10.
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