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@inproceedings{205654,
author = {Eliáš, Marek and Šůstek, Josef and Janča, Jan},
address = {Praha},
booktitle = {ICPP},
edition = {1.},
keywords = {carbon nitride films; PECVD},
language = {eng},
location = {Praha},
pages = {919-920},
publisher = {Ústav fyziky plazmatu ČAV, Praha},
title = {Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD},
year = {1998}
}
TY - JOUR
ID - 205654
AU - Eliáš, Marek - Šůstek, Josef - Janča, Jan
PY - 1998
TI - Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD
PB - Ústav fyziky plazmatu ČAV, Praha
CY - Praha
KW - carbon nitride films
KW - PECVD
ER -
ELIÁŠ, Marek, Josef ŠŮSTEK a Jan JANČA. Characterization of Hydrogenated Carbon Nitride Films Prepared by the PECVD. In \textit{ICPP}. 1. vyd. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, s.~919-920.
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