| OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA a Miroslav TYKAL. Comparison of optical and non-optical methods for measuring surface roughness. In Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 1999, s. 456-467. ISBN 0-8194-3306-3. |
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@inproceedings{207571,
author = {Ohlídal, Ivan and Ohlídal, Miloslav and Franta, Daniel and Tykal, Miroslav},
address = {Bellingham, Washington, USA},
booktitle = {Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics},
keywords = {Coherent optics; Surface roughness; Metrology},
language = {eng},
location = {Bellingham, Washington, USA},
isbn = {0-8194-3306-3},
pages = {456-467},
publisher = {SPIE - The International Society for Optical Engineering},
title = {Comparison of optical and non-optical methods for measuring surface roughness},
url = {http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html},
year = {1999}
}
TY - JOUR
ID - 207571
AU - Ohlídal, Ivan - Ohlídal, Miloslav - Franta, Daniel - Tykal, Miroslav
PY - 1999
TI - Comparison of optical and non-optical methods for measuring surface roughness
PB - SPIE - The International Society for Optical Engineering
CY - Bellingham, Washington, USA
SN - 0819433063
KW - Coherent optics
KW - Surface roughness
KW - Metrology
UR - http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html
N2 - The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.
ER -
OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA a Miroslav TYKAL. Comparison of optical and non-optical methods for measuring surface roughness. In \textit{Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics}. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 1999, s.~456-467. ISBN~0-8194-3306-3.
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