OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA and Miroslav TYKAL. Comparison of optical and non-optical methods for measuring surface roughness. In Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 1999, p. 456-467. ISBN 0-8194-3306-3.
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Basic information
Original name Comparison of optical and non-optical methods for measuring surface roughness
Authors OHLÍDAL, Ivan (203 Czech Republic, guarantor), Miloslav OHLÍDAL, Daniel FRANTA (203 Czech Republic) and Miroslav TYKAL.
Edition Bellingham, Washington, USA, Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, p. 456-467, 1999.
Publisher SPIE - The International Society for Optical Engineering
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10302 Condensed matter physics
Country of publisher United States of America
Confidentiality degree is not subject to a state or trade secret
WWW URL
RIV identification code RIV/00216224:14310/99:00002100
Organization unit Faculty of Science
ISBN 0-8194-3306-3
UT WoS 000082158500060
Keywords in English Coherent optics; Surface roughness; Metrology
Tags Coherent optics, Metrology, Surface roughness
Changed by Changed by: Mgr. Daniel Franta, Ph.D., učo 2000. Changed: 21/12/2003 23:20.
Abstract
The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.
Links
GA202/98/0988, research and development projectName: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod
Investor: Czech Science Foundation, Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods
VS96084, research and development projectName: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze
Investor: Ministry of Education, Youth and Sports of the CR, Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague
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