| OHLÍDAL, Ivan, Daniel FRANTA, Emil PINČÍK a Miloslav OHLÍDAL. Complete Optical Characterization of the SiO2/Si System by Spectroscopic Ellipsometry Spectroscopic Reflectometry and Atomic Force Microscopy. Surface and Interface Analysis. USA: John Wiley & Sons, roč. 28, č. 1, s. 240-244. ISSN 0142-2421. 1999. |
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@article{208731,
author = {Ohlídal, Ivan and Franta, Daniel and Pinčík, Emil and Ohlídal, Miloslav},
article_location = {USA},
article_number = {1},
keywords = {Optical constants of Si and SiO2; Spectrosopic reflectometry; Spectroscopic ellipsometry},
language = {eng},
issn = {0142-2421},
journal = {Surface and Interface Analysis},
title = {Complete Optical Characterization of the SiO2/Si System by Spectroscopic Ellipsometry Spectroscopic Reflectometry and Atomic Force Microscopy},
url = {http://hydra.physics.muni.cz/~franta/bib/SIA28_240.html},
volume = {28},
year = {1999}
}
TY - JOUR
ID - 208731
AU - Ohlídal, Ivan - Franta, Daniel - Pinčík, Emil - Ohlídal, Miloslav
PY - 1999
TI - Complete Optical Characterization of the SiO2/Si System by Spectroscopic Ellipsometry Spectroscopic Reflectometry and Atomic Force Microscopy
JF - Surface and Interface Analysis
VL - 28
IS - 1
SP - 240
EP - 240
PB - John Wiley & Sons
SN - 01422421
KW - Optical constants of Si and SiO2
KW - Spectrosopic reflectometry
KW - Spectroscopic ellipsometry
UR - http://hydra.physics.muni.cz/~franta/bib/SIA28_240.html
N2 - In this paper results concerning the optical analysis of the system SiO2/Si performed by the combined ellipsometric and reflectometric method used in the multiple-sample modification will be presented. This method is based on combining both the single-wavelength method and dispersion method. Three models of the system mentioned, i.e. the model of the substrate and the layer with the smooth boundaries, the same model with transition layer and the model of the substrate and the layer with rough boundaries, will be used to interpret the experimental data. The spectral dependences of the optical constants of silicon and SiO2 with the values of the other parameters will be determined. It will be shown that the simplest model with the smooth boundary is the most convenient with the experimental data.
ER -
OHLÍDAL, Ivan, Daniel FRANTA, Emil PINČÍK a Miloslav OHLÍDAL. Complete Optical Characterization of the SiO2/Si System by Spectroscopic Ellipsometry Spectroscopic Reflectometry and Atomic Force Microscopy. \textit{Surface and Interface Analysis}. USA: John Wiley \&{} Sons, roč.~28, č.~1, s.~240-244. ISSN~0142-2421. 1999.
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