| OHLÍDAL, Ivan, Daniel FRANTA, Petr KLAPETEK a Martin VIČAR. Relationship Between AFM and Optical Measurements at Analyzing Surface Roughness. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 1999, roč. 44, č. 10, s. 307-311. ISSN 0447-6441. |
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@article{211391,
author = {Ohlídal, Ivan and Franta, Daniel and Klapetek, Petr and Vičar, Martin},
article_location = {Přerov},
article_number = {10},
language = {eng},
issn = {0447-6441},
journal = {Jemná mechanika a optika},
title = {Relationship Between AFM and Optical Measurements at Analyzing Surface Roughness},
url = {http://hydra.physics.muni.cz/~franta/bib/JMO1999_307.html},
volume = {44},
year = {1999}
}
TY - JOUR
ID - 211391
AU - Ohlídal, Ivan - Franta, Daniel - Klapetek, Petr - Vičar, Martin
PY - 1999
TI - Relationship Between AFM and Optical Measurements at Analyzing Surface Roughness
JF - Jemná mechanika a optika
VL - 44
IS - 10
SP - 307
EP - 307
PB - Physical Institute, ASCR
SN - 04476441
UR - http://hydra.physics.muni.cz/~franta/bib/JMO1999_307.html
N2 - In this paper a comparison of the values of the basic surface roughness parameters determined by atomic force microscopy and a combined optical method is performed for a chosen sample of SiO2-film with identically randomly rough boundaries placed onto a silicon single crystal wafer. The combined optical method is based on simultaneous interpretation of the experimental data corresponding to variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. It is shown that the comparison of the results achieved using both the methods mentioned can be successfully performed if the influence influence of individual spatial frequencies of the harmonic components of random surface roughness on the optical quantities measured is based into account.
ER -
OHLÍDAL, Ivan, Daniel FRANTA, Petr KLAPETEK a Martin VIČAR. Relationship Between AFM and Optical Measurements at Analyzing Surface Roughness. \textit{Jemná mechanika a optika}. Přerov: Physical Institute, ASCR, 1999, roč.~44, č.~10, s.~307-311. ISSN~0447-6441.
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