| GRIM, Jan, Václav HOLÝ, Josef KUBĚNA, J. STANGL, A.A. DARHUBER, S. ZERLAUTH, F. SCHÄFFLER and G. BAUER. Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers. Semicond. Sci. Technol. Velká Britanie: IOP Publishing Ltd, 1999, 32(1999), -, p. A216, 4 pp. ISSN 0268-1242. |
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@article{216011,
author = {Grim, Jan and Holý, Václav and Kuběna, Josef and Stangl, J. and Darhuber, A.A. and Zerlauth, S. and Schäffler, F. and Bauer, G.},
article_location = {Velká Britanie},
article_number = {-},
language = {eng},
issn = {0268-1242},
journal = {Semicond. Sci. Technol.},
title = {Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers},
volume = {32(1999)},
year = {1999}
}
TY - JOUR
ID - 216011
AU - Grim, Jan - Holý, Václav - Kuběna, Josef - Stangl, J. - Darhuber, A.A. - Zerlauth, S. - Schäffler, F. - Bauer, G.
PY - 1999
TI - Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers
JF - Semicond. Sci. Technol.
VL - 32(1999)
IS - -
SP - A216
EP - A216
PB - IOP Publishing Ltd
SN - 02681242
ER -
GRIM, Jan, Václav HOLÝ, Josef KUBĚNA, J. STANGL, A.A. DARHUBER, S. ZERLAUTH, F. SCHÄFFLER and G. BAUER. Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers. \textit{Semicond. Sci. Technol.}. Velká Britanie: IOP Publishing Ltd, 1999, 32(1999), -, p.~A216, 4 pp. ISSN~0268-1242.
|
