The wide range optical spectrum characterization of the silicon
and oxygen doped diamond like carbon inhomogeneous thin films

J 2022

The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films

ČERMÁK, Martin; Štěpánka KELAROVÁ; Jana JURMANOVÁ; Pavlína KÜHROVÁ; Vilma BURŠÍKOVÁ et al.

Základní údaje

Originální název

The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films

Autoři

ČERMÁK, Martin; Štěpánka KELAROVÁ; Jana JURMANOVÁ; Pavlína KÜHROVÁ a Vilma BURŠÍKOVÁ

Vydání

Diamond and Related Materials, Elsevier Ltd, 2022, 0925-9635

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

20506 Coating and films

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 4.100

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/22:00126854

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Ellipsometry; Spectrophotometry; Diamond like carbon; Inhomogeneous thin film; Scanning electron microscope

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 27. 2. 2024 13:22, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

Optical characterization from the FIR to the V-UV region of silicon and oxygen doped carbon films deposited on a silicon substrates is performed. In this work, the deposited films are considered as optically inhomogeneous, i.e., the optical constants depend on the depth in the films. According to the optical analysis, there is a transition layers under the deposited films with optical constants similar to amorphous silicon with hydrogen, carbon and oxygen additions. The film thicknesses obtained from optical characterization are compared with those obtained from scanning electron microscope images. From electron microscope images it is evident that the film properties are truly depth-dependent. The optical constants of the films and transition layers as functions of photon energy over the studied spectrum are determined. The static conductivity of the films is determined from measurements in FIR region. From spectral analysis in the mid-infrared region, resonance peaks were detected and the chemical composition of the film and transition layers is presented. The chemical composition is compared with the results of the EDX.

Návaznosti

GA19-15240S, projekt VaV

Název: Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

Investor: Grantová agentura ČR, Multifunkční nanokompozitní polymerní tenké vrstvy s řízenými povrchovými a mechanickými vlastnostmi připravené v RF prachovém plazmatu

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

ČERMÁK, Martin; Štěpánka KELAROVÁ; Jana JURMANOVÁ; Pavlína KÜHROVÁ a Vilma BURŠÍKOVÁ. The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films. Diamond and Related Materials. Elsevier Ltd, 2022, roč. 128, October 2022, s. 1-16. ISSN 0925-9635. Dostupné z: https://doi.org/10.1016/j.diamond.2022.109245.

@article{2223900,
   author = {Čermák, Martin and Kelarová, Štěpánka and Jurmanová, Jana and Kührová, Pavlína and Buršíková, Vilma},
   article_number = {October 2022},
   doi = {https://doi.org/10.1016/j.diamond.2022.109245},
   keywords = {Ellipsometry; Spectrophotometry; Diamond like carbon; Inhomogeneous thin film; Scanning electron microscope},
   language = {eng},
   issn = {0925-9635},
   journal = {Diamond and Related Materials},
   title = {The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films},
   url = {https://www.sciencedirect.com/science/article/pii/S0925963522004277#!},
   volume = {128},
   year = {2022}
}

TY  - JOUR
ID  - 2223900
AU  - Čermák, Martin - Kelarová, Štěpánka - Jurmanová, Jana - Kührová, Pavlína - Buršíková, Vilma
PY  - 2022
TI  - The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films
JF  - Diamond and Related Materials
VL  - 128
IS  - October 2022
SP  - 1-16
EP  - 1-16
PB  - Elsevier Ltd
SN  - 09259635
KW  - Ellipsometry
KW  - Spectrophotometry
KW  - Diamond like carbon
KW  - Inhomogeneous thin film
KW  - Scanning electron microscope
UR  - https://www.sciencedirect.com/science/article/pii/S0925963522004277#!
N2  - Optical characterization from the FIR to the V-UV region of silicon and oxygen doped carbon films deposited on a silicon substrates is performed. In this work, the deposited films are considered as optically inhomogeneous, i.e., the optical constants depend on the depth in the films. According to the optical analysis, there is a transition layers under the deposited films with optical constants similar to amorphous silicon with hydrogen, carbon and oxygen additions. The film thicknesses obtained from optical characterization are compared with those obtained from scanning electron microscope images. From electron microscope images it is evident that the film properties are truly depth-dependent. The optical constants of the films and transition layers as functions of photon energy over the studied spectrum are determined. The static conductivity of the films is determined from measurements in FIR region. From spectral analysis in the mid-infrared region, resonance peaks were detected and the chemical composition of the film and transition layers is presented. The chemical composition is compared with the results of the EDX.
ER  -

ČERMÁK, Martin; Štěpánka KELAROVÁ; Jana JURMANOVÁ; Pavlína KÜHROVÁ a Vilma BURŠÍKOVÁ. The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films. \textit{Diamond and Related Materials}. Elsevier Ltd, 2022, roč.~128, October 2022, s.~1-16. ISSN~0925-9635. Dostupné z: https://doi.org/10.1016/j.diamond.2022.109245.

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