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@article{2286922,
author = {Dvořák, Jan and Vohánka, Jiří and Buršíková, Vilma and Franta, Daniel and Ohlídal, Ivan},
article_number = {5},
doi = {http://dx.doi.org/10.3390/coatings13050873},
keywords = {optical characterization; inhomogeneous thin films; non-absorbing substrates; dual-side measurements; spectroscopic ellipsometry; spectrophotometry; polymer-like thin films; optical properties},
language = {eng},
issn = {2079-6412},
journal = {Coatings},
title = {Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates},
url = {https://www.mdpi.com/2079-6412/13/5/873},
volume = {13},
year = {2023}
}
TY - JOUR
ID - 2286922
AU - Dvořák, Jan - Vohánka, Jiří - Buršíková, Vilma - Franta, Daniel - Ohlídal, Ivan
PY - 2023
TI - Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates
JF - Coatings
VL - 13
IS - 5
SP - 1-16
EP - 1-16
PB - MDPI
SN - 20796412
KW - optical characterization
KW - inhomogeneous thin films
KW - non-absorbing substrates
KW - dual-side measurements
KW - spectroscopic ellipsometry
KW - spectrophotometry
KW - polymer-like thin films
KW - optical properties
UR - https://www.mdpi.com/2079-6412/13/5/873
N2 - In this study, a novel approach for characterizing the optical properties of inhomogeneous thin films is presented, with a particular focus on samples exhibiting absorption in some part of the measured spectral range. Conventional methods of measuring the samples only from the film side can be limited by incomplete information at the lower boundary of the film, leading to potentially unreliable results. To address this issue, depositing the thin films onto non-absorbing substrates to enable measurements from both sides of the sample is proposed. To demonstrate the efficacy of this approach, a combination of variable-angle spectroscopic ellipsometry and spectrophotometry at near-normal incidence was employed to optically characterize three inhomogeneous polymer-like thin films. The spectral dependencies of the optical constants were modeled using the Kramers–Kronig consistent model. It was found that it is necessary to consider thin, weakly absorbing transition layers between the films and the substrates. The obtained results show excellent agreement between the fits and the measured data, providing validation of the structural and dispersion models, as well as the overall characterization procedure. The proposed approach offers a method for optically characterizing a diverse range of inhomogeneous thin films, providing more reliable results when compared to traditional one-sided measurements.
ER -
DVOŘÁK, Jan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ, Daniel FRANTA a Ivan OHLÍDAL. Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates. \textit{Coatings}. MDPI, 2023, roč.~13, č.~5, s.~1-16. ISSN~2079-6412. Dostupné z: https://dx.doi.org/10.3390/coatings13050873.
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