Optical method for determining the power spectral density
function of randomly rough surfaces by simultaneous processing
of spectroscopic reflectometry, variable-angle spectroscopic
ellipsometry and angle-resolved scattering data

J 2023

Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

VOHÁNKA, Jiří; Václav ŠULC; Ivan OHLÍDAL; Miloslav OHLÍDAL; Petr KLAPETEK et al.

Základní údaje

Originální název

Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data

Autoři

VOHÁNKA, Jiří; Václav ŠULC; Ivan OHLÍDAL; Miloslav OHLÍDAL a Petr KLAPETEK

Vydání

Optik, Elsevier, 2023, 0030-4026

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Německo

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.100 v roce 2022

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/23:00131677

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Roughness; Angle-resolved scattering; Ellipsometry; Power spectral density function; Rayleigh-Rice theory; Scalar diffraction theory

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 22. 2. 2024 09:42, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved scattering, spectroscopic reflectometry and variable-angle spectroscopic ellipsometry. For each sample, the experimental optical data are processed simultaneously to determine the power spectral density functions, which are modeled by exponentials of quadratic splines. The thicknesses of native oxide layers are also determined. The influence of roughness on the reflectance and ellipsometry is described by the combination of the scalar diffraction theory, which is used for the part of roughness with low spatial frequencies, and the Rayleigh-Rice theory, which is used for the part of roughness with high and moderate spatial frequencies. The separation of the roughness into the parts with low and high/moderate spatial frequencies is performed using a bound dependent on the wavelength of the incident light. The PSDFs determined by the optical method are compared with the PSDFs determined by processing the AFM scans.

Návaznosti

FV40328, projekt VaV

Název: Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

Investor: Ministerstvo průmyslu a obchodu ČR, Realizace vrstevnatých systémů s požadovanými spektrálními závislostmi odrazivosti a propustnosti ve střední ultrafialové oblasti spektra

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

VOHÁNKA, Jiří; Václav ŠULC; Ivan OHLÍDAL; Miloslav OHLÍDAL a Petr KLAPETEK. Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data. Optik. Elsevier, 2023, roč. 280, June, s. 1-13. ISSN 0030-4026. Dostupné z: https://doi.org/10.1016/j.ijleo.2023.170775.

@article{2310144,
   author = {Vohánka, Jiří and Šulc, Václav and Ohlídal, Ivan and Ohlídal, Miloslav and Klapetek, Petr},
   article_number = {June},
   doi = {https://doi.org/10.1016/j.ijleo.2023.170775},
   keywords = {Roughness; Angle-resolved scattering; Ellipsometry; Power spectral density function; Rayleigh-Rice theory; Scalar diffraction theory},
   language = {eng},
   issn = {0030-4026},
   journal = {Optik},
   title = {Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data},
   url = {https://doi.org/10.1016/j.ijleo.2023.170775},
   volume = {280},
   year = {2023}
}

TY  - JOUR
ID  - 2310144
AU  - Vohánka, Jiří - Šulc, Václav - Ohlídal, Ivan - Ohlídal, Miloslav - Klapetek, Petr
PY  - 2023
TI  - Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data
JF  - Optik
VL  - 280
IS  - June
SP  - 1-13
EP  - 1-13
PB  - Elsevier
SN  - 00304026
KW  - Roughness
KW  - Angle-resolved scattering
KW  - Ellipsometry
KW  - Power spectral density function
KW  - Rayleigh-Rice theory
KW  - Scalar diffraction theory
UR  - https://doi.org/10.1016/j.ijleo.2023.170775
N2  - Two samples of silicon-single crystal substrates with randomly rough surfaces covered by native oxide layers are investigated by means of angle-resolved scattering, spectroscopic reflectometry and variable-angle spectroscopic ellipsometry. For each sample, the experimental optical data are processed simultaneously to determine the power spectral density functions, which are modeled by exponentials of quadratic splines. The thicknesses of native oxide layers are also determined. The influence of roughness on the reflectance and ellipsometry is described by the combination of the scalar diffraction theory, which is used for the part of roughness with low spatial frequencies, and the Rayleigh-Rice theory, which is used for the part of roughness with high and moderate spatial frequencies. The separation of the roughness into the parts with low and high/moderate spatial frequencies is performed using a bound dependent on the wavelength of the incident light. The PSDFs determined by the optical method are compared with the PSDFs determined by processing the AFM scans.
ER  -

VOHÁNKA, Jiří; Václav ŠULC; Ivan OHLÍDAL; Miloslav OHLÍDAL a Petr KLAPETEK. Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data. \textit{Optik}. Elsevier, 2023, roč.~280, June, s.~1-13. ISSN~0030-4026. Dostupné z: https://doi.org/10.1016/j.ijleo.2023.170775.

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