Synthesis and characterization of the ceramic refractory metal
high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W
system

a 2023

Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system

SOUČEK, Pavel; Tomasz STASIAK; Stanislava DEBNÁROVÁ; Vilma BURŠÍKOVÁ; Nikola KOUTNÁ et al.

Základní údaje

Originální název

Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system

Autoři

SOUČEK, Pavel; Tomasz STASIAK; Stanislava DEBNÁROVÁ ; Vilma BURŠÍKOVÁ; Nikola KOUTNÁ; Shuyao LIN; Zsolt CZIGÁNY; Katalin BALÁZSI a Petr VAŠINA

Vydání

TACT2023 International Thin Films Conference, 2023

Další údaje

Jazyk

angličtina

Typ výsledku

Konferenční abstrakt

Obor

20506 Coating and films

Stát vydavatele

Tchaj-wan

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/23:00134338

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

magnetron sputtering; thin films; high entropy ceramics

Příznaky

Mezinárodní význam

Změněno: 27. 12. 2023 10:07, doc. Mgr. Pavel Souček, Ph.D.

Anotace

V originále

In this contribution, we focus on high entropy alloy, nitride and carbide coatings from the Cr-Hf-Mo-Ta-W system. The study aims to investigate the effects of deposition temperature and reactive gas flow on the microstructure, crystalline structure and mechanical properties of coatings deposited by reactive magnetron sputtering and hybrid PVD-PECVD magnetron sputtering from elemental segmented targets. The depositions are carried out at ambient temperatures and at 750°C. In particular, we will discuss the bcc-amorphous-fcc structure transition as the function of the nitrogen/carbon content, the differences between the reactive magnetron sputtering and hybrid PVD/PECVD sputtering on the deposition rate, the (absence) of the nitrogen/carbon content saturation and its effects on the micro- and nanostructure of the coatings and on the effect of the structure on the mechanical properties. Experimental findings are corroborated by ab initio density functional theory calculations. Finally, we will talk about the possibilities of future industrial applications.

Návaznosti

GA23-05947S, projekt VaV

Název: Teorií směřované studium povlaků keramik stabilizovaných vysokou entropií založených na těžkotavitelných kovech

Investor: Grantová agentura ČR, Teorií směřované studium povlaků keramik stabilizovaných vysokou entropií založených na těžkotavitelných kovech

Citovat

SOUČEK, Pavel; Tomasz STASIAK; Stanislava DEBNÁROVÁ; Vilma BURŠÍKOVÁ; Nikola KOUTNÁ; Shuyao LIN; Zsolt CZIGÁNY; Katalin BALÁZSI a Petr VAŠINA. Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system. In TACT2023 International Thin Films Conference. 2023.

@proceedings{2353479,
   author = {Souček, Pavel and Stasiak, Tomasz and Debnárová, Stanislava and Buršíková, Vilma and Koutná, Nikola and Lin, Shuyao and Czigány, Zsolt and Balázsi, Katalin and Vašina, Petr},
   booktitle = {TACT2023 International Thin Films Conference},
   keywords = {magnetron sputtering; thin films; high entropy ceramics},
   language = {eng},
   title = {Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system},
   url = {https://tact2023.conf.tw/site/page.aspx?pid=901&sid=1481&lang=en},
   year = {2023}
}

TY  - CONF
ID  - 2353479
AU  - Souček, Pavel - Stasiak, Tomasz - Debnárová, Stanislava - Buršíková, Vilma - Koutná, Nikola - Lin, Shuyao - Czigány, Zsolt - Balázsi, Katalin - Vašina, Petr
PY  - 2023
TI  - Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system
KW  - magnetron sputtering
KW  - thin films
KW  - high entropy ceramics
UR  - https://tact2023.conf.tw/site/page.aspx?pid=901&sid=1481&lang=en
N2  - In this contribution, we focus on high entropy alloy, nitride and carbide coatings from the Cr-Hf-Mo-Ta-W system. The study aims to investigate the effects of deposition temperature and reactive gas flow on the microstructure, crystalline structure and mechanical properties of coatings deposited by reactive magnetron sputtering and hybrid PVD-PECVD magnetron sputtering from elemental segmented targets. The depositions are carried out at ambient temperatures and at 750°C. In particular, we will discuss the bcc-amorphous-fcc structure transition as the function of the nitrogen/carbon content, the differences between the reactive magnetron sputtering and hybrid PVD/PECVD sputtering on the deposition rate, the (absence) of the nitrogen/carbon content saturation and its effects on the micro- and nanostructure of the coatings and on the effect of the structure on the mechanical properties. Experimental findings are corroborated by ab initio density functional theory calculations. Finally, we will talk about the possibilities of future industrial applications.
ER  -

SOUČEK, Pavel; Tomasz STASIAK; Stanislava DEBNÁROVÁ; Vilma BURŠÍKOVÁ; Nikola KOUTNÁ; Shuyao LIN; Zsolt CZIGÁNY; Katalin BALÁZSI a Petr VAŠINA. Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system. In \textit{TACT2023 International Thin Films Conference}. 2023.

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