Optical characterization of inhomogeneity of polymer-like thin
films arising in the initial phase of plasma-enhanced chemical
vapor deposition

J 2024

Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

DVOŘÁK, Jan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL

Základní údaje

Originální název

Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

Autoři

DVOŘÁK, Jan (203 Česká republika, garant, domácí), Jiří VOHÁNKA (203 Česká republika, domácí), Vilma BURŠÍKOVÁ (203 Česká republika, domácí) a Ivan OHLÍDAL (203 Česká republika, domácí)

Vydání

Heliyon, Elsevier Ltd, 2024, 2405-8440

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 4.000 v roce 2022

Organizační jednotka

Přírodovědecká fakulta

DOI

http://dx.doi.org/10.1016/j.heliyon.2024.e27246

UT WoS

001222776100001

Klíčová slova anglicky

Ellipsometry; Reflectometry; Optical characterization; Polymer-like thin films; Plasma polymer; Inhomogeneity

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 11. 10. 2024 13:56, Mgr. Marie Šípková, DiS.

Anotace

V originále

In this study, an optical investigation in a wide spectral range of polymer-like (SiOxCyHz) thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented. The primary focus is on assessing the homogeneity of the grown films. Within the PECVD, it is possible to alter the properties of the deposited material by continually adjusting deposition process parameters and hence allow for the growth of inhomogeneous layers. However, as shown in this study, the growth of homogeneous layers could be similarly challenging. This challenge is especially pronounced at the beginning of the deposition process, where it is necessary to consider the influence of the substrate among other factors, as even slight variations in the deposition conditions can lead to the formation of inhomogeneous layers. Several series of polymer-like thin films were deposited onto silicon substrates with the goal of producing homogeneous layers, i.e. all deposition parameters were held constant. These samples were optically characterized with a special interest in homogeneity, especially at the beginning of the growth. It was found that initial inhomogeneous growth is always present. The thickness of the initial inhomogeneous part was found to be surprisingly large.

Návaznosti

LM2023039, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

DVOŘÁK, Jan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition. Heliyon. Elsevier Ltd, 2024, roč. 10, č. 5, s. 1-12. ISSN 2405-8440. Dostupné z: https://dx.doi.org/10.1016/j.heliyon.2024.e27246.

@article{2394537,
   author = {Dvořák, Jan and Vohánka, Jiří and Buršíková, Vilma and Ohlídal, Ivan},
   article_number = {5},
   doi = {http://dx.doi.org/10.1016/j.heliyon.2024.e27246},
   keywords = {Ellipsometry; Reflectometry; Optical characterization; Polymer-like thin films; Plasma polymer; Inhomogeneity},
   language = {eng},
   issn = {2405-8440},
   journal = {Heliyon},
   title = {Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition},
   url = {https://www.sciencedirect.com/science/article/pii/S2405844024032778},
   volume = {10},
   year = {2024}
}

TY  - JOUR
ID  - 2394537
AU  - Dvořák, Jan - Vohánka, Jiří - Buršíková, Vilma - Ohlídal, Ivan
PY  - 2024
TI  - Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition
JF  - Heliyon
VL  - 10
IS  - 5
SP  - 1-12
EP  - 1-12
PB  - Elsevier Ltd
SN  - 24058440
KW  - Ellipsometry
KW  - Reflectometry
KW  - Optical characterization
KW  - Polymer-like thin films
KW  - Plasma polymer
KW  - Inhomogeneity
UR  - https://www.sciencedirect.com/science/article/pii/S2405844024032778
N2  - In this study, an optical investigation in a wide spectral range of polymer-like (SiOxCyHz) thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented. The primary focus is on assessing the homogeneity of the grown films. Within the PECVD, it is possible to alter the properties of the deposited material by continually adjusting deposition process parameters and hence allow for the growth of inhomogeneous layers. However, as shown in this study, the growth of homogeneous layers could be similarly challenging. This challenge is especially pronounced at the beginning of the deposition process, where it is necessary to consider the influence of the substrate among other factors, as even slight variations in the deposition conditions can lead to the formation of inhomogeneous layers. Several series of polymer-like thin films were deposited onto silicon substrates with the goal of producing homogeneous layers, i.e. all deposition parameters were held constant. These samples were optically characterized with a special interest in homogeneity, especially at the beginning of the growth. It was found that initial inhomogeneous growth is always present. The thickness of the initial inhomogeneous part was found to be surprisingly large.
ER  -

DVOŘÁK, Jan, Jiří VOHÁNKA, Vilma BURŠÍKOVÁ a Ivan OHLÍDAL. Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition. \textit{Heliyon}. Elsevier Ltd, 2024, roč.~10, č.~5, s.~1-12. ISSN~2405-8440. Dostupné z: https://dx.doi.org/10.1016/j.heliyon.2024.e27246.

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