Exploring different approaches of multipulse HiPIMS

J 2025

Exploring different approaches of multipulse HiPIMS

HNILICA, Jaroslav; Pavel SOUČEK; Martin ONDRYÁŠ; Peter KLEIN; Matej FEKETE et al.

Základní údaje

Originální název

Exploring different approaches of multipulse HiPIMS

Autoři

HNILICA, Jaroslav; Pavel SOUČEK; Martin ONDRYÁŠ ; Peter KLEIN; Matej FEKETE a Petr VAŠINA

Vydání

Surface and Coatings Technology, Elsevier B.V. 2025, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 6.100 v roce 2024

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/25:00140476

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Titanium; Microstructure control; Magnetron sputtering; HiPIMS; Multipulse

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 9. 7. 2025 13:52, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

Three different approaches for using high power impulse magnetron sputtering (HiPIMS) with a titanium target were examined in terms of plasma diagnostics and coating properties. In all three approaches, a 1 kW average power was kept constant. The first approach involves splitting a strong single HiPIMS pulse into multiple evenly distributed weaker pulses by proportionally dividing the period. The second approach is based on the first one, but the pulses are grouped together in a short burst, or pulse package, where the overall period is conserved. Comparing the second approach to the first enables the identification of the effect of pulse grouping. In the third approach, the pulses are also grouped into the pulse package, however, the period is extended proportionally to the number of pulses in the pulse package. This allows for the creation of short bursts of energetic pulses separated by very long off-times while maintaining the duty cycle. In this way, it is possible to determine whether the grouping of the strong pulses into a pulse package is more beneficial for the deposition than the negative effects induced by prolonging the off-time. Plasma diagnostics revealed that grouping the pulses into packages in the second approach resulted in a higher ionised metal flux fraction on the substrate compared to the first approach, which led to stronger ion bombardment of the growing coating, resulting in denser coatings and changes in the crystalline microstructure. The third approach did not increase ionised metal flux fraction significantly but influenced the texture and grain size of the growing films.

Návaznosti

90239, velká výzkumná infrastruktura

Název: CEPLANT II

Citovat

HNILICA, Jaroslav; Pavel SOUČEK; Martin ONDRYÁŠ; Peter KLEIN; Matej FEKETE a Petr VAŠINA. Exploring different approaches of multipulse HiPIMS. Surface and Coatings Technology. Elsevier B.V., 2025, roč. 496, January, s. 1-11. ISSN 0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2024.131670.

@article{2465090,
   author = {Hnilica, Jaroslav and Souček, Pavel and Ondryáš, Martin and Klein, Peter and Fekete, Matej and Vašina, Petr},
   article_number = {January},
   doi = {https://doi.org/10.1016/j.surfcoat.2024.131670},
   keywords = {Titanium; Microstructure control; Magnetron sputtering; HiPIMS; Multipulse},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface and Coatings Technology},
   title = {Exploring different approaches of multipulse HiPIMS},
   url = {https://www.sciencedirect.com/science/article/pii/S0257897224013021},
   volume = {496},
   year = {2025}
}

TY  - JOUR
ID  - 2465090
AU  - Hnilica, Jaroslav - Souček, Pavel - Ondryáš, Martin - Klein, Peter - Fekete, Matej - Vašina, Petr
PY  - 2025
TI  - Exploring different approaches of multipulse HiPIMS
JF  - Surface and Coatings Technology
VL  - 496
IS  - January
SP  - 1-11
EP  - 1-11
PB  - Elsevier B.V.
SN  - 02578972
KW  - Titanium
KW  - Microstructure control
KW  - Magnetron sputtering
KW  - HiPIMS
KW  - Multipulse
UR  - https://www.sciencedirect.com/science/article/pii/S0257897224013021
N2  - Three different approaches for using high power impulse magnetron sputtering (HiPIMS) with a titanium target were examined in terms of plasma diagnostics and coating properties. In all three approaches, a 1 kW average power was kept constant. The first approach involves splitting a strong single HiPIMS pulse into multiple evenly distributed weaker pulses by proportionally dividing the period. The second approach is based on the first one, but the pulses are grouped together in a short burst, or pulse package, where the overall period is conserved. Comparing the second approach to the first enables the identification of the effect of pulse grouping. In the third approach, the pulses are also grouped into the pulse package, however, the period is extended proportionally to the number of pulses in the pulse package. This allows for the creation of short bursts of energetic pulses separated by very long off-times while maintaining the duty cycle. In this way, it is possible to determine whether the grouping of the strong pulses into a pulse package is more beneficial for the deposition than the negative effects induced by prolonging the off-time. Plasma diagnostics revealed that grouping the pulses into packages in the second approach resulted in a higher ionised metal flux fraction on the substrate compared to the first approach, which led to stronger ion bombardment of the growing coating, resulting in denser coatings and changes in the crystalline microstructure. The third approach did not increase ionised metal flux fraction significantly but influenced the texture and grain size of the growing films.
ER  -

HNILICA, Jaroslav; Pavel SOUČEK; Martin ONDRYÁŠ; Peter KLEIN; Matej FEKETE a Petr VAŠINA. Exploring different approaches of multipulse HiPIMS. \textit{Surface and Coatings Technology}. Elsevier B.V., 2025, roč.~496, January, s.~1-11. ISSN~0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2024.131670.

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