Industrial reactive sputter deposition of TiZrN coatings: The
role of nitrogen partial pressure

J 2025

Industrial reactive sputter deposition of TiZrN coatings: The role of nitrogen partial pressure

BEHRANGI, Sahand; Diederik DEPLA; Pavel SOUČEK; Zsolt CZIGANY; Vilma BURŠÍKOVÁ et. al.

Základní údaje

Originální název

Industrial reactive sputter deposition of TiZrN coatings: The role of nitrogen partial pressure

Autoři

BEHRANGI, Sahand (364 Írán, domácí); Diederik DEPLA; Pavel SOUČEK (203 Česká republika, domácí); Zsolt CZIGANY; Vilma BURŠÍKOVÁ (203 Česká republika, domácí); Katalin BALAZSI a Petr VAŠINA (203 Česká republika, domácí)

Vydání

Surface and Coatings Technology, ELSEVIER SCIENCE SA, 2025, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 6.100 v roce 2024

Organizační jednotka

Přírodovědecká fakulta

DOI

https://doi.org/10.1016/j.surfcoat.2025.131873

UT WoS

001424165100001

EID Scopus

2-s2.0-85216840145

Klíčová slova anglicky

Nitrogen partial pressure; X-ray diffraction; Microstructure; Selected area electron diffraction; Hardness

Štítky

rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 9. 7. 2025 12:56, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

Reactive sputter deposition of TiN, ZrN, and TiZrN coatings at different nitrogen partial pressures was performed under industrial conditions using a combinatorial approach. For all coatings, the nitrogen content rose with increasing nitrogen partial pressure and then leveled off above a given pressure. The ZrN coatings exhibited a columnar structure irrespective of the nitrogen pressure used. In contrast, the microstructure of TiN and TiZrN varied depending on the nitrogen partial pressure. A different behavior of the crystallite size as a function of the nitrogen partial pressure was observed for TiN and ZrN. A strong dependence was noticed for TiN. This contrasted with the behavior of ZrN which had much smaller crystallites. Smaller crystallites were also observed in the TiZrN coatings and the influence of the nitrogen partial pressure and the Ti/(Ti + Zr) ratio on these coatings was weak. The coloration of the coatings was notably influenced by nitrogen partial pressure. The level of red for the TiN and TiZrN coatings and the yellow hue for the ZrN coatings significantly increased with nitrogen partial pressure. The hardness of all TiZrN coatings peaked at intermediate nitrogen partial pressures, which indicates that nitrogen partial pressure enables the optimization of mechanical properties. The highest measured hardness (31 GPa) was obtained at a Ti/(Ti + Zr) ratio of 0.50 although similar values were obtained irrespective of the metallic elements. This study demonstrates the potential to enhance the mechanical properties of TiN by incorporating Zr provided the correct nitrogen partial pressure is selected.

Návaznosti

90097, velká výzkumná infrastruktura

Název: CEPLANT

Citovat

BEHRANGI, Sahand; Diederik DEPLA; Pavel SOUČEK; Zsolt CZIGANY; Vilma BURŠÍKOVÁ; Katalin BALAZSI a Petr VAŠINA. Industrial reactive sputter deposition of TiZrN coatings: The role of nitrogen partial pressure. Surface and Coatings Technology. ELSEVIER SCIENCE SA, 2025, roč. 499, March, s. 1-13. ISSN 0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2025.131873.

@article{2483437,
   author = {Behrangi, Sahand and Depla, Diederik and Souček, Pavel and Czigany, Zsolt and Buršíková, Vilma and Balazsi, Katalin and Vašina, Petr},
   article_number = {March},
   doi = {https://doi.org/10.1016/j.surfcoat.2025.131873},
   keywords = {Nitrogen partial pressure; X-ray diffraction; Microstructure; Selected area electron diffraction; Hardness},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface and Coatings Technology},
   title = {Industrial reactive sputter deposition of TiZrN coatings: The role of nitrogen partial pressure},
   url = {https://doi.org/10.1016/j.surfcoat.2025.131873},
   volume = {499},
   year = {2025}
}

TY  - JOUR
ID  - 2483437
AU  - Behrangi, Sahand - Depla, Diederik - Souček, Pavel - Czigany, Zsolt - Buršíková, Vilma - Balazsi, Katalin - Vašina, Petr
PY  - 2025
TI  - Industrial reactive sputter deposition of TiZrN coatings: The role of nitrogen partial pressure
JF  - Surface and Coatings Technology
VL  - 499
IS  - March
SP  - 1-13
EP  - 1-13
PB  - ELSEVIER SCIENCE SA
SN  - 02578972
KW  - Nitrogen partial pressure
KW  - X-ray diffraction
KW  - Microstructure
KW  - Selected area electron diffraction
KW  - Hardness
UR  - https://doi.org/10.1016/j.surfcoat.2025.131873
N2  - Reactive sputter deposition of TiN, ZrN, and TiZrN coatings at different nitrogen partial pressures was performed under industrial conditions using a combinatorial approach. For all coatings, the nitrogen content rose with increasing nitrogen partial pressure and then leveled off above a given pressure. The ZrN coatings exhibited a columnar structure irrespective of the nitrogen pressure used. In contrast, the microstructure of TiN and TiZrN varied depending on the nitrogen partial pressure. A different behavior of the crystallite size as a function of the nitrogen partial pressure was observed for TiN and ZrN. A strong dependence was noticed for TiN. This contrasted with the behavior of ZrN which had much smaller crystallites. Smaller crystallites were also observed in the TiZrN coatings and the influence of the nitrogen partial pressure and the Ti/(Ti + Zr) ratio on these coatings was weak. The coloration of the coatings was notably influenced by nitrogen partial pressure. The level of red for the TiN and TiZrN coatings and the yellow hue for the ZrN coatings significantly increased with nitrogen partial pressure. The hardness of all TiZrN coatings peaked at intermediate nitrogen partial pressures, which indicates that nitrogen partial pressure enables the optimization of mechanical properties. The highest measured hardness (31 GPa) was obtained at a Ti/(Ti + Zr) ratio of 0.50 although similar values were obtained irrespective of the metallic elements. This study demonstrates the potential to enhance the mechanical properties of TiN by incorporating Zr provided the correct nitrogen partial pressure is selected.
ER  -

BEHRANGI, Sahand; Diederik DEPLA; Pavel SOUČEK; Zsolt CZIGANY; Vilma BURŠÍKOVÁ; Katalin BALAZSI a Petr VAŠINA. Industrial reactive sputter deposition of TiZrN coatings: The role of nitrogen partial pressure. \textit{Surface and Coatings Technology}. ELSEVIER SCIENCE SA, 2025, roč.~499, March, s.~1-13. ISSN~0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2025.131873.

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