Wide spectral range optical characterization of tantalum
pentoxide (Ta2O5) films by the universal dispersion model

J 2025

Wide spectral range optical characterization of tantalum pentoxide (Ta2O5) films by the universal dispersion model

FRANTA, Daniel; Jiří VOHÁNKA; Jan DVOŘÁK; Pavel FRANTA; Ivan OHLÍDAL et al.

Základní údaje

Originální název

Wide spectral range optical characterization of tantalum pentoxide (Ta2O5) films by the universal dispersion model

Autoři

FRANTA, Daniel; Jiří VOHÁNKA; Jan DVOŘÁK; Pavel FRANTA; Ivan OHLÍDAL; Petr KLAPETEK; Jaromir BŘEZINA a David ŠKODA

Vydání

Optical Materials Express, Optica Publishing Group, 2025, 2159-3930

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.100 v roce 2024

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/25:00141097

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

THIN-FILMS; DIELECTRIC FUNCTION; CONSTANTS; SEMICONDUCTORS; ULTRAVIOLET; DEPOSITION; FREQUENCY; COATINGS; INDEX; OXIDE

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 9. 7. 2025 14:09, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

This study presents a comprehensive optical characterization of tantalum pentoxide (Ta2O5) thin films across a wide spectral range, using a combination of ellipsometric and spectrophotometric data. The films prepared using e-beam evaporation, ranging in thickness from 20 to 250 nm, were analyzed using a complex structural model that integrates inhomogeneous layer profiles with three distinct phases, allowing for a more accurate representation of the material's optical properties. A universal dispersion model was employed to describe the optical constants, revealing the refractive index and extinction coefficient with exceptional precision. This work stands out due to the extensive spectral range covered-extending from the far infrared (400 mu m, 25 cm-1) to the vacuum ultraviolet (116 nm, 10.7 eV)-and the diverse array of instruments used, providing a level of detail and insight into Ta2O5's optical behavior that has not been achieved before. This novel approach offers significant advancements in understanding Ta2O5's optical characteristics, demonstrating its potential for advanced optical coatings and optoelectronic applications. (c) 2025 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

Návaznosti

EI22_002/0000677, projekt VaV

Název: Pokročilá optika pro aplikace ultrakrátkých laserových pulzů ve vlnové oblasti DUV, VIS a NIR

90239, velká výzkumná infrastruktura

Název: CEPLANT II

90251, velká výzkumná infrastruktura

Název: CzechNanoLab II

Citovat

FRANTA, Daniel; Jiří VOHÁNKA; Jan DVOŘÁK; Pavel FRANTA; Ivan OHLÍDAL; Petr KLAPETEK; Jaromir BŘEZINA a David ŠKODA. Wide spectral range optical characterization of tantalum pentoxide (Ta2O5) films by the universal dispersion model. Optical Materials Express. Optica Publishing Group, 2025, roč. 15, č. 4, s. 903-919. ISSN 2159-3930. Dostupné z: https://doi.org/10.1364/OME.550708.

@article{2493877,
   author = {Franta, Daniel and Vohánka, Jiří and Dvořák, Jan and Franta, Pavel and Ohlídal, Ivan and Klapetek, Petr and Březina, Jaromir and Škoda, David},
   article_number = {4},
   doi = {https://doi.org/10.1364/OME.550708},
   keywords = {THIN-FILMS; DIELECTRIC FUNCTION; CONSTANTS; SEMICONDUCTORS; ULTRAVIOLET; DEPOSITION; FREQUENCY; COATINGS; INDEX; OXIDE},
   language = {eng},
   issn = {2159-3930},
   journal = {Optical Materials Express},
   title = {Wide spectral range optical characterization of tantalum pentoxide (Ta2O5) films by the universal dispersion model},
   url = {https://doi.org/10.1364/OME.550708},
   volume = {15},
   year = {2025}
}

TY  - JOUR
ID  - 2493877
AU  - Franta, Daniel - Vohánka, Jiří - Dvořák, Jan - Franta, Pavel - Ohlídal, Ivan - Klapetek, Petr - Březina, Jaromir - Škoda, David
PY  - 2025
TI  - Wide spectral range optical characterization of tantalum pentoxide (Ta2O5) films by the universal dispersion model
JF  - Optical Materials Express
VL  - 15
IS  - 4
SP  - 903-919
EP  - 903-919
PB  - Optica Publishing Group
SN  - 21593930
KW  - THIN-FILMS
KW  - DIELECTRIC FUNCTION
KW  - CONSTANTS
KW  - SEMICONDUCTORS
KW  - ULTRAVIOLET
KW  - DEPOSITION
KW  - FREQUENCY
KW  - COATINGS
KW  - INDEX
KW  - OXIDE
UR  - https://doi.org/10.1364/OME.550708
N2  - This study presents a comprehensive optical characterization of tantalum pentoxide (Ta2O5) thin films across a wide spectral range, using a combination of ellipsometric and spectrophotometric data. The films prepared using e-beam evaporation, ranging in thickness from 20 to 250 nm, were analyzed using a complex structural model that integrates inhomogeneous layer profiles with three distinct phases, allowing for a more accurate representation of the material's optical properties. A universal dispersion model was employed to describe the optical constants, revealing the refractive index and extinction coefficient with exceptional precision. This work stands out due to the extensive spectral range covered-extending from the far infrared (400 mu m, 25 cm-1) to the vacuum ultraviolet (116 nm, 10.7 eV)-and the diverse array of instruments used, providing a level of detail and insight into Ta2O5's optical behavior that has not been achieved before. This novel approach offers significant advancements in understanding Ta2O5's optical characteristics, demonstrating its potential for advanced optical coatings and optoelectronic applications. (c) 2025 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
ER  -

FRANTA, Daniel; Jiří VOHÁNKA; Jan DVOŘÁK; Pavel FRANTA; Ivan OHLÍDAL; Petr KLAPETEK; Jaromir BŘEZINA a David ŠKODA. Wide spectral range optical characterization of tantalum pentoxide (Ta2O5) films by the universal dispersion model. \textit{Optical Materials Express}. Optica Publishing Group, 2025, roč.~15, č.~4, s.~903-919. ISSN~2159-3930. Dostupné z: https://doi.org/10.1364/OME.550708.

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