Quantifying argon and metal ion fluxes in HiPIMS using a
biasable QCM

J 2025

Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM

ONDRYÁŠ, Martin; Peter KLEIN; Jaroslav HNILICA a Petr VAŠINA

Základní údaje

Originální název

Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM

Autoři

ONDRYÁŠ, Martin ; Peter KLEIN; Jaroslav HNILICA a Petr VAŠINA

Vydání

Surface and Coatings Technology, Elsevier B.V. 2025, 0257-8972

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10508 Physical geography

Stát vydavatele

Švýcarsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 6.100 v roce 2024

Označené pro přenos do RIV

Ano

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova anglicky

Ar ion flux; HiPIMS; Ionisation measurement; IPVD; Magnetron sputtering; QCM

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 13. 11. 2025 15:00, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

This paper presents measurements of particle fluxes at the substrate during a HiPIMS discharge using a novel biasable quartz crystal microbalance system, enabling detection of Ti neutrals, Ti ions, and, for the first time, Ar ions. Two target geometries were compared at equal power density and peak current density, and two different power supplies were tested under nominally identical conditions to assess the role of generator design. The study shows that particle fluxes are strongly affected by target geometry, pressure, and generator type. The rectangular target produced higher and more variable fluxes than the circular one, while increasing pressure consistently reduced them. Differences between generators mainly influenced the balance between Ti neutrals and ions, whereas Ar ion fluxes remained similar. Overall, Ar ion fluxes were consistently dominant, exceeding Ti ion fluxes by about an order of magnitude.

Návaznosti

LM2023039, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

ONDRYÁŠ, Martin; Peter KLEIN; Jaroslav HNILICA a Petr VAŠINA. Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM. Surface and Coatings Technology. Elsevier B.V., 2025, roč. 517, December, s. 132847-132857. ISSN 0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2025.132847.

@article{2530658,
   author = {Ondryáš, Martin and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
   article_number = {December},
   doi = {https://doi.org/10.1016/j.surfcoat.2025.132847},
   keywords = {Ar ion flux; HiPIMS; Ionisation measurement; IPVD; Magnetron sputtering; QCM},
   language = {eng},
   issn = {0257-8972},
   journal = {Surface and Coatings Technology},
   title = {Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM},
   url = {https://doi.org/10.1016/j.surfcoat.2025.132847},
   volume = {517},
   year = {2025}
}

TY  - JOUR
ID  - 2530658
AU  - Ondryáš, Martin - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY  - 2025
TI  - Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM
JF  - Surface and Coatings Technology
VL  - 517
IS  - December
SP  - 132847
EP  - 132847
PB  - Elsevier B.V.
SN  - 02578972
KW  - Ar ion flux
KW  - HiPIMS
KW  - Ionisation measurement
KW  - IPVD
KW  - Magnetron sputtering
KW  - QCM
UR  - https://doi.org/10.1016/j.surfcoat.2025.132847
N2  - This paper presents measurements of particle fluxes at the substrate during a HiPIMS discharge using a novel biasable quartz crystal microbalance system, enabling detection of Ti neutrals, Ti ions, and, for the first time, Ar ions. Two target geometries were compared at equal power density and peak current density, and two different power supplies were tested under nominally identical conditions to assess the role of generator design. The study shows that particle fluxes are strongly affected by target geometry, pressure, and generator type. The rectangular target produced higher and more variable fluxes than the circular one, while increasing pressure consistently reduced them. Differences between generators mainly influenced the balance between Ti neutrals and ions, whereas Ar ion fluxes remained similar. Overall, Ar ion fluxes were consistently dominant, exceeding Ti ion fluxes by about an order of magnitude.
ER  -

ONDRYÁŠ, Martin; Peter KLEIN; Jaroslav HNILICA a Petr VAŠINA. Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM. \textit{Surface and Coatings Technology}. Elsevier B.V., 2025, roč.~517, December, s.~132847-132857. ISSN~0257-8972. Dostupné z: https://doi.org/10.1016/j.surfcoat.2025.132847.

Přehled o publikaci