Microcantilever-assessed fracture toughness of industrially
deposited TiZrN coatings at various nitrogen partial pressures

J 2026

Microcantilever-assessed fracture toughness of industrially deposited TiZrN coatings at various nitrogen partial pressures

BEHRANGI, Sahand; Rainer HAHN; Philip KUTROWATZ; Sabine SCHWARZ; Vilma BURŠÍKOVÁ et al.

Základní údaje

Originální název

Microcantilever-assessed fracture toughness of industrially deposited TiZrN coatings at various nitrogen partial pressures

Autoři

BEHRANGI, Sahand; Rainer HAHN; Philip KUTROWATZ; Sabine SCHWARZ; Vilma BURŠÍKOVÁ; Pavel SOUČEK; Helmut RIEDL a Petr VAŠINA

Vydání

Vacuum, PERGAMON-ELSEVIER SCIENCE LTD, 2026, 0042-207X

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 3.900 v roce 2024

Označené pro přenos do RIV

Ano

Organizační jednotka

Přírodovědecká fakulta

DOI

https://doi.org/10.1016/j.vacuum.2026.115186

UT WoS

001696395100001

Klíčová slova anglicky

Fracture toughness; Hardness; Nitrogen partial pressure; Reactive magnetron sputtering; Solid solution

Štítky

14312030, rivok

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 9. 3. 2026 10:12, Mgr. Marie Novosadová Šípková, DiS.

Anotace

V originále

TiZrN coatings were deposited using reactive magnetron sputtering under industrial conditions at three different nitrogen partial pressures: 0.008, 0.040, and 0.200 Pa. TiN and ZrN coatings were also prepared as reference materials. All ternary TiZrN coatings exhibited a face-centered cubic (FCC) structured solid solution. TiZrN coating deposited at a nitrogen partial pressure of 0.040 Pa exhibited the highest hardness of 31 ± 1 GPa, while TiN and ZrN approached 25 ± 3 GPa and 26 ± 1 GPa, respectively. The fracture toughness of the coatings was evaluated using the microcantilever bending method. KIC (critical stress intensity factor in mode I) for TiN reached 2.2 ± 0.4 MPa.m1/2 compared to 2.6 ± 0.3 MPa.m1/2 for ZrN. Incorporating Zr to TiN led to an enhanced fracture resistance by 17-27%, depending on the nitrogen partial pressure. The highest KIC recorded was 2.8 ± 0.3 MPa.m1/2, achieved at a partial pressure of 0.040 Pa.

Návaznosti

LM2023039, projekt VaV

Název: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, R&D centre for plasma and nanotechnology surface modifications

Citovat

BEHRANGI, Sahand; Rainer HAHN; Philip KUTROWATZ; Sabine SCHWARZ; Vilma BURŠÍKOVÁ; Pavel SOUČEK; Helmut RIEDL a Petr VAŠINA. Microcantilever-assessed fracture toughness of industrially deposited TiZrN coatings at various nitrogen partial pressures. Vacuum. PERGAMON-ELSEVIER SCIENCE LTD, 2026, roč. 248, May, s. 1-8. ISSN 0042-207X. Dostupné z: https://doi.org/10.1016/j.vacuum.2026.115186.

@article{2555519,
   author = {Behrangi, Sahand and Hahn, Rainer and Kutrowatz, Philip and Schwarz, Sabine and Buršíková, Vilma and Souček, Pavel and Riedl, Helmut and Vašina, Petr},
   article_number = {May},
   doi = {https://doi.org/10.1016/j.vacuum.2026.115186},
   keywords = {Fracture toughness; Hardness; Nitrogen partial pressure; Reactive magnetron sputtering; Solid solution},
   language = {eng},
   issn = {0042-207X},
   journal = {Vacuum},
   title = {Microcantilever-assessed fracture toughness of industrially deposited TiZrN coatings at various nitrogen partial pressures},
   url = {https://www.sciencedirect.com/science/article/pii/S0042207X26001247},
   volume = {248},
   year = {2026}
}

TY  - JOUR
ID  - 2555519
AU  - Behrangi, Sahand - Hahn, Rainer - Kutrowatz, Philip - Schwarz, Sabine - Buršíková, Vilma - Souček, Pavel - Riedl, Helmut - Vašina, Petr
PY  - 2026
TI  - Microcantilever-assessed fracture toughness of industrially deposited TiZrN coatings at various nitrogen partial pressures
JF  - Vacuum
VL  - 248
IS  - May
SP  - 1-8
EP  - 1-8
PB  - PERGAMON-ELSEVIER SCIENCE LTD
SN  - 0042207X
KW  - Fracture toughness
KW  - Hardness
KW  - Nitrogen partial pressure
KW  - Reactive magnetron sputtering
KW  - Solid solution
UR  - https://www.sciencedirect.com/science/article/pii/S0042207X26001247
N2  - TiZrN coatings were deposited using reactive magnetron sputtering under industrial conditions at three different nitrogen partial pressures: 0.008, 0.040, and 0.200 Pa. TiN and ZrN coatings were also prepared as reference materials. All ternary TiZrN coatings exhibited a face-centered cubic (FCC) structured solid solution. TiZrN coating deposited at a nitrogen partial pressure of 0.040 Pa exhibited the highest hardness of 31 ± 1 GPa, while TiN and ZrN approached 25 ± 3 GPa and 26 ± 1 GPa, respectively. The fracture toughness of the coatings was evaluated using the microcantilever bending method. KIC (critical stress intensity factor in mode I) for TiN reached 2.2 ± 0.4 MPa.m1/2 compared to 2.6 ± 0.3 MPa.m1/2 for ZrN. Incorporating Zr to TiN led to an enhanced fracture resistance by 17-27%, depending on the nitrogen partial pressure. The highest KIC recorded was 2.8 ± 0.3 MPa.m1/2, achieved at a partial pressure of 0.040 Pa.
ER  -

BEHRANGI, Sahand; Rainer HAHN; Philip KUTROWATZ; Sabine SCHWARZ; Vilma BURŠÍKOVÁ; Pavel SOUČEK; Helmut RIEDL a Petr VAŠINA. Microcantilever-assessed fracture toughness of industrially deposited TiZrN coatings at various nitrogen partial pressures. \textit{Vacuum}. PERGAMON-ELSEVIER SCIENCE LTD, 2026, roč.~248, May, s.~1-8. ISSN~0042-207X. Dostupné z: https://doi.org/10.1016/j.vacuum.2026.115186.

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