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@article{362485,
author = {Humlíček, Josef and Garriga, M. and Alonso, M.I. and Cardona, M.},
article_location = {USA},
article_number = {7},
language = {eng},
issn = {0021-8979},
journal = {J. Appl. Phys.},
title = {OPTICAL-SPECTRA OF SIXGE1-X ALLOYS},
volume = {65},
year = {1989}
}
TY - JOUR
ID - 362485
AU - Humlíček, Josef - Garriga, M. - Alonso, M.I. - Cardona, M.
PY - 1989
TI - OPTICAL-SPECTRA OF SIXGE1-X ALLOYS
JF - J. Appl. Phys.
VL - 65
IS - 7
SP - 2827
EP - 2827
PB - American Institute of Physics
SN - 00218979
N2 - We report pseudodielectric functions of SiGe alloys at room temperature, measured ellipsometrically on polycrystalline samples and single-crystal epitaxial layers, in the 1.8-5,6 eV range. Accurate values of the E1 threshold energies are obtained from numerically differentiated spectra. The measured dependence of E1 on x provides an efficient way to determine the alloy composition x. The spectral and compositional dependence of the optical constants forms a data base for optical studies of Si/SiGe layerede structures.
ER -
HUMLÍČEK, Josef. OPTICAL-SPECTRA OF SIXGE1-X ALLOYS. \textit{J. Appl. Phys.}. USA: American Institute of Physics, 1989, roč.~65, č.~7, s.~2827-2832. ISSN~0021-8979.
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