Determination of Thicknesses and Spectral Dependences of
Refractive Indices of Non-Absorbing and Weakly Absorbing Thin
Films Using the Wavelengths Related to Extrema in Spectral
Reflectances

J 2001

Determination of Thicknesses and Spectral Dependences of Refractive Indices of Non-Absorbing and Weakly Absorbing Thin Films Using the Wavelengths Related to Extrema in Spectral Reflectances

OHLÍDAL, Ivan; Daniel FRANTA; Miloslav OHLÍDAL a Karel NAVRÁTIL

Základní údaje

Originální název

Determination of Thicknesses and Spectral Dependences of Refractive Indices of Non-Absorbing and Weakly Absorbing Thin Films Using the Wavelengths Related to Extrema in Spectral Reflectances

Autoři

OHLÍDAL, Ivan; Daniel FRANTA; Miloslav OHLÍDAL a Karel NAVRÁTIL

Vydání

Vacuum, USA, ELSEVIER (PERGAMON), 2001, 0042-207X

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Impakt faktor

Impact factor: 0.541

Označené pro přenos do RIV

Ano

Kód RIV

RIV/00216224:14310/01:00004312

Organizační jednotka

Přírodovědecká fakulta

UT WoS

000168796500035

Klíčová slova anglicky

Thin films; Spectral reflectance; Optical parameters

Štítky

Optical parameters, Spectral reflectance, thin films

Změněno: 25. 12. 2003 00:21, Mgr. Daniel Franta, Ph.D.

Anotace

V originále

In this contribution a new efficient modification of the method enabling us to perform the optical characterization of non-absorbing and weakly absorbing thin films without using the absolute values of the reflectances measured will be presented. Namely, this modification is based on determining the values of the wavelengths corresponding to the points of touching the spectral dependences of the reflectances of the studied films measured for several angles of incidence with the envelopes of maxima and minima of these spectral dependences. By means of combining the explicit formulae containing the wavelengths mentioned and the suitable iteration procedure one can evaluate the values of the thicknesses and spectral dependences of the refractive indices of the films analyzed in both reliable and precise ways. This fact will be demonstrated through the optical characterization of non-absorbing films of silicon dioxide and weakly absorbing films of photoresist placed on silicon single crystal substrates. The results of this characterization will be compared with those achieved using a combined method of variable angle of incidence spectroscopic ellipsometry and near normal incidence spectroscopic reflectometry.

Návaznosti

GA202/98/0988, projekt VaV

Název: Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

Investor: Grantová agentura ČR, Charakterizace vrstevnatých systémů s náhodně drsnými rozhraními pomocí optických a rtg metod

GV106/96/K245, projekt VaV

Název: Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

Investor: Grantová agentura ČR, Tvrdé a supertvrdé povlaky vytvořené nekonvenčními plazmovými procesy

VS96084, projekt VaV

Název: Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Společné laboratoře pro aplikovanou fyziku plazmatu a plazmovou chemii na PřF a PedF MU, VA v Brně a ÚFP AV ČR v Praze

Citovat

OHLÍDAL, Ivan; Daniel FRANTA; Miloslav OHLÍDAL a Karel NAVRÁTIL. Determination of Thicknesses and Spectral Dependences of Refractive Indices of Non-Absorbing and Weakly Absorbing Thin Films Using the Wavelengths Related to Extrema in Spectral Reflectances. Vacuum. USA: ELSEVIER (PERGAMON), 2001, roč. 61, č. 1, s. 285-289. ISSN 0042-207X.

@article{366094,
   author = {Ohlídal, Ivan and Franta, Daniel and Ohlídal, Miloslav and Navrátil, Karel},
   article_location = {USA},
   article_number = {1},
   keywords = {Thin films; Spectral reflectance; Optical parameters},
   language = {eng},
   issn = {0042-207X},
   journal = {Vacuum},
   title = {Determination of Thicknesses and Spectral Dependences of Refractive Indices of Non-Absorbing and Weakly Absorbing Thin Films Using the Wavelengths Related to Extrema in Spectral Reflectances},
   url = {http://hydra.physics.muni.cz/~franta/bib/VAC61_285.html},
   volume = {61},
   year = {2001}
}

TY  - JOUR
ID  - 366094
AU  - Ohlídal, Ivan - Franta, Daniel - Ohlídal, Miloslav - Navrátil, Karel
PY  - 2001
TI  - Determination of Thicknesses and Spectral Dependences of Refractive Indices of Non-Absorbing and Weakly Absorbing Thin Films Using the Wavelengths Related to Extrema in Spectral Reflectances
JF  - Vacuum
VL  - 61
IS  - 1
SP  - 285-289
EP  - 285-289
PB  - ELSEVIER (PERGAMON)
SN  - 0042207X
KW  - Thin films
KW  - Spectral reflectance
KW  - Optical parameters
UR  - http://hydra.physics.muni.cz/~franta/bib/VAC61_285.html
N2  - In this contribution a new efficient modification of the method enabling us to perform the optical characterization of non-absorbing and weakly absorbing thin films without using the absolute values of the reflectances measured will be presented. Namely, this modification is based on determining the values of the wavelengths corresponding to the points of touching the spectral dependences of the reflectances of the studied films measured for several angles of incidence with the envelopes of maxima and minima of these spectral dependences. By means of combining the explicit formulae containing the wavelengths mentioned and the suitable iteration procedure one can evaluate the values of the thicknesses and spectral dependences of the refractive indices of the films analyzed in both reliable and precise ways. This fact will be demonstrated through the optical characterization of non-absorbing films of silicon dioxide and weakly absorbing films of photoresist placed on silicon single crystal substrates. The results of this characterization will be compared with those achieved using a combined method of variable angle of incidence spectroscopic ellipsometry and near normal incidence spectroscopic reflectometry.
ER  -

OHLÍDAL, Ivan; Daniel FRANTA; Miloslav OHLÍDAL a Karel NAVRÁTIL. Determination of Thicknesses and Spectral Dependences of Refractive Indices of Non-Absorbing and Weakly Absorbing Thin Films Using the Wavelengths Related to Extrema in Spectral Reflectances. \textit{Vacuum}. USA: ELSEVIER (PERGAMON), 2001, roč.~61, č.~1, s.~285-289. ISSN~0042-207X.

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