D 2001

Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD

BRZOBOHATÝ, Oto, Lenka ZAJÍČKOVÁ and Vilma BURŠÍKOVÁ

Basic information

Original name

Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD

Name in Czech

Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD

Authors

BRZOBOHATÝ, Oto (203 Czech Republic), Lenka ZAJÍČKOVÁ (203 Czech Republic, guarantor) and Vilma BURŠÍKOVÁ (203 Czech Republic)

Edition

1. vyd. Brno, JUNIORMAT 01, p. 144-145, 2001

Publisher

ÚMI VUT FSI v Brně ve spolupráci s Českou společností pro nové materiály a technologie

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/01:00004507

Organization unit

Faculty of Science

ISBN

80-214-1885-0

Keywords in English

Diamond-like carbon; PECVD; Ellipsometry

Tags

Změněno: 8/2/2008 20:06, doc. RNDr. Vilma Buršíková, Ph.D.

Abstract

ORIG CZ

V originále

Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied.

In Czech

Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied.

Links

GA202/00/P037, research and development project
Name: Plazmová depozice ochranných vrstev: charakterizace připravených vrstev a diagnostika užitého reaktivního plazmatu
Investor: Czech Science Foundation, Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used
ME 301, research and development project
Name: Vývoj a průmyslová aplikace nových supertvrdých nanokrystalických kompozitních otěruvzdorných ochranných vrstev
Investor: Ministry of Education, Youth and Sports of the CR, Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings
MSM 143100003, plan (intention)
Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates